A dynamic gas distribution instrument and gas distribution method thereof
A gas distribution instrument and dynamic technology, applied in chemical instruments and methods, mixing methods, gas and gas/vapor mixing, etc., can solve the problems affecting gas distribution accuracy, controllability and service life, easy residual gas, etc. The effect of expanding the gas flow range, simple structure and simple design
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[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0032] It should be noted that, in this embodiment, the standard gas may be one or more of nitrogen monoxide, carbon monoxide, carbon dioxide, methane, and propane; the diluent gas is clean air.
[0033] On the one hand, if figure 2 As shown, the embodiment of the present invention provides a dynamic gas distribution instrument, including a...
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