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Conveyor

A conveying device and hole-slot technology, used in glass transportation equipment, manufacturing tools, glass manufacturing equipment, etc., can solve problems such as cracking, glass conveying platform slippage, etc., to save costs, avoid cracking, avoid automatic shutdown and The effect of worker load

Active Publication Date: 2020-11-06
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Aiming at the problem that the glass in the prior art relatively slips relative to the conveying platform and may cause fragmentation, the present invention proposes a conveying device used in rapid annealing equipment

Method used

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Embodiment Construction

[0028] The content of the present invention will be described in detail below in conjunction with the accompanying drawings. The words "up", "down", "left" and "right" are all relative to the directions shown in the drawings and should not be construed as limiting the present invention. "First" and "second" in the present invention are only used to distinguish multiple structures in the device, and do not represent actual differences in the structures. For example, the first blocking mechanism 221 and the second blocking mechanism 221' are both blocking mechanisms, and there is no difference in the actual structure, and they are only named for the sake of clearly marking the structure.

[0029] The present invention proposes a conveying device for rapid heating and annealing equipment, which includes a platform, and also includes a blocking mechanism on the side of the platform facing the glass and oppositely arranged on the peripheries of two opposite sides of the glass. The ...

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Abstract

The invention provides a conveying device applied to a rapid thermal anneal apparatus in the technical field of display. The conveying device comprises a platform, and barrier mechanisms arranged on one side of super like glass and oppositely arranged in the periphery of two opposite edges of the glass. The barrier mechanisms can prevent the glass from slipping relative to the platform or keep the slip amount in an error range, so the rapid thermal anneal device cannot detect the position change of the glass, automatic shutdown and the carrying capacity of working personnel caused by the position change are avoided, fragmentation generated by too large slip of the glass is also avoided, and the cost is saved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a delivery device used in rapid heating annealing equipment. Background technique [0002] Currently, Rapid Thermal Anneal (RTA) equipment is more and more used in low-temperature polysilicon panel manufacturing processes, such as dehydrogenation and ion activation. RTA equipment includes processing units such as uploading unit, temperature control unit, rapid cooling unit, unloading unit, and return unit. When the glass enters the RTA equipment for process treatment, it is first placed on the conveying platform in the uploading unit, which is carried by the conveying platform and enters the temperature control unit, rapid cooling unit, unloading unit, etc. for annealing treatment and returns through the return unit. to the waiting area. During the process of annealing the glass, the glass is always placed on the conveying platform, and the conveying platform drives the glass ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B35/14C03B25/00
CPCC03B25/00C03B35/142
Inventor 肖东辉
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD