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Surface acoustic wave (saw) resonators

An acoustic wave and filter technology, applied in the field of surface acoustic wave resonators, can solve problems such as affecting the performance of the filter

Active Publication Date: 2020-10-13
AVAGO TECH INT SALES PTE LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These spurious modes are spurious and can affect the performance of filters including SAW resonators

Method used

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  • Surface acoustic wave (saw) resonators
  • Surface acoustic wave (saw) resonators
  • Surface acoustic wave (saw) resonators

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Embodiment Construction

[0015] In the following detailed description, for purposes of explanation and not limitation, representative embodiments disclosing specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to one of ordinary skill having the benefit of this disclosure that other embodiments in accordance with this invention that depart from the specific details disclosed herein remain within the scope of the appended claims. Moreover, descriptions of well-known devices and methods may be omitted so as not to obscure the description of the representative embodiments. Such methods and apparatus are clearly within the scope of the present invention.

[0016] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. Any defined term also includes the technical and scientific meaning of the defined term as commonly understood and a...

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Abstract

An apparatus includes a silicon (Si) substrate having a first surface and a second surface, the silicon substrate having a resistivity at room temperature greater than approximately 1000 Ω-cm, and less than approximately 15000 Ω-cm; and a piezoelectric layer disposed over the substrate and having a first surface and a second surface. The piezoelectric layer may have a thickness in the range of approximately 0.5 μm to approximately 30.0 μm, and is substantially without iron (Fe).

Description

technical field [0001] The present invention relates to surface acoustic wave (saw) resonators. Background technique [0002] Electric resonators are widely incorporated into modern electronic devices. For example, in wireless communication devices, radio frequency (RF) and microwave frequency resonators are used in filters, eg, with electrical series and parallel resonators forming trapezoidal and lattice structures. Filters can be included in, for example, duplexers (duplexers, triplexers, quadplexers, quinplexers, etc.) connected between the antenna (there may be several antennas as for MIMO) and the transceiver. Filtering the received signal and the transmitted signal. [0003] Various types of filters use mechanical resonators, such as surface acoustic wave (SAW) resonators. A resonator converts electrical signals into mechanical signals or vibrations, and / or converts mechanical signals or vibrations into electrical signals. [0004] Although specific surface modes ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/25H03H9/02
CPCH03H9/02559H03H9/02574H03H9/25H03H9/02866H03H9/02622H03H9/64
Inventor 理查德·C·鲁比斯蒂芬·罗伊·吉尔伯特约翰·D·拉森三世
Owner AVAGO TECH INT SALES PTE LTD