Optical fiber interference confocal system for on-line inspection of processing quality of optical components

Abstract

The present invention discloses an optical fiber interference confocal system used for optical element processing quality online detection. The system adopts an optical fiber device to carry out the common optical path integration on a white light interference system and a laser confocal system to realize the optical element multi-parameter simultaneous online detection, wherein an optical path adjusting method combining the optical delay lines and the piezoelectric ceramics is used to position the interference position rapidly and scan axially, the devices, such as a CCD camera, a porous annulus filter plug-in, etc., are integrated in a measurement probe in a spatial optical path form to realize the white light interference full-field measurement and the laser confocal high-resolution measurement, and the integrated measurement probe is carried on a five-dimension movement bench to realize the high degree of freedom pose adjustment of the measurement probe. The system of the present invention has the characteristics of being small in size, compact in structure and strong in anti-interference capability, etc., the measurement probe and a system main body device are separated, the spatial distance can be adjusted flexibly, the position of a to-be-measured optical element does not need to be adjusted, and the optical fiber interference confocal system has the great advantage for the large-aperture optical element processing quality online detection.

Description

technical field [0001] The invention belongs to the cutting-edge research fields of optics, electronic technology, precision machinery, microscopic photography and the like, and specifically relates to an optical fiber interference confocal system for on-line detection of processing quality of optical elements. Background technique [0002] Large-aperture optical components are of great significance to modern information science. With the continuous development of processing accuracy, the processing accuracy of large-aperture optical components continues to increase, and its shape accuracy needs to be the same as or higher than the light wavelength, and the surface roughness Ra value is less than 1 / 10 of the light wavelength, that is, in the sub- Micron or nanometer level; on the other hand, since the surface parameters of large-aperture optical components are often at the macro scale, this requires the test system to be able to take into account both large-scale and high-pr...

AI Technical Summary

Problems solved by technology

However, there are still many challenges in the processing quality inspection of large-aperture optical components: 1) The surface roughness and subsurface damage are not detected on the same device, and it is impossible to guarantee the simultaneous detection of surface roughness and subsurface in the same area to be measured, so that The processing quality of the measured area cannot be truly evaluated; 2) The requirements for the detection environment are extremely high, and there are also high requirements for the size of the tested part and the accuracy and stability of its adjustment device, which limits the detection to only It is carried out in a laboratory with good conditions such as vibration, constant temperature and humidity, which greatly reduces the detection efficiency

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