Multidirectional micro-nano force measurement device and method

A measurement device and measurement method technology, applied in the field of force measurement, can solve the problem of not meeting the high requirements of micro-nano Newton-level force value measurement, unable to measure micro-nano force value, etc., to overcome the non-vertical direction micro-nano force Value measurement, reduce measurement costs, meet high requirements

Pending Publication Date: 2017-09-29
广东省计量科学研究院(华南国家计量测试中心)
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current measuring device of micro-nano Newton force value cannot measure micro-nano force value in non-vertical direction, and cannot meet people's high requirements for micro-nano Newton level force value measurement, and needs to be further improved and improved.

Method used

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  • Multidirectional micro-nano force measurement device and method
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  • Multidirectional micro-nano force measurement device and method

Examples

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no. 1 example

[0069] Taking the measuring device of the present invention when measuring the micro-nano force in the horizontal direction as an example, the measuring device is mainly composed of five parts, 1 is an elastic support mechanism, which is mainly used to receive the micro-nano force value and the standard micro-nano force value applied by the outside world And a small deformation occurs; 2 is the standard micro-nano force value generating device, which is mainly used as a force source to generate a standard micro-nano force value that is balanced with the measured micro-nano force value; 3 is a position measurement device, mainly used to determine the elastic support mechanism 1 4 is the loading mechanism, which is used to load the measured micro-nano force value; 5 is the fixed plate, which is used to fix the front end of the elastic support mechanism.

[0070] Among them, the elastic support mechanism 1 of the present invention can adopt figure 2 elastic devices of the shape,...

no. 2 example

[0086] When the micro-nano force measuring device of the present invention measures the micro-nano force in any direction in space, its working principle is as follows: figure 1 shown.

[0087] Taking the standard micro-nano-force value generating device as an interdigitated capacitor device as an example, due to the existence of the micro-nano-force measuring device's own weight, the elastic support mechanism 1 will be slightly deformed, and its position will change from position A to position B. At the same time, the slight deformation of the elastic support structure 1 causes a slight change in the position between the two fingers of the standard electrostatic micro-nano force generating device 2 . At this point, the initial equilibrium position of the micro-nano force measuring device of the present invention is the position where the elastic support mechanism 1 is slightly deformed (such as figure 1 Indicated by the dotted line B), that is to say, when the micro-nano for...

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Abstract

The invention discloses a multidirectional micro-nano force measurement device and method. The device comprises a loading mechanism, a standard micro-nano force value generation device, an elastic supporting mechanism and a position measurement device, wherein a tail end of the elastic supporting mechanism is connected with the position measurement device, and the standard micro-nano force value generation device and the loading device are mounted at two sides of the elastic supporting mechanism. The method comprises steps that the balance position of the elastic supporting mechanism is acquired; a measured micro-nano force value is applied to the elastic supporting mechanism through the loading mechanism to make the elastic supporting mechanism deviate from the balance position; magnitude of electrostatic force of the standard micro-nano force value generation device is adjusted to make the elastic supporting mechanism recover to the balance position from a position deviating from the balance position; the measured micro-nano force value is calculated according to magnitude of the electrostatic force of the standard micro-nano force value generation device during recovery to the balance position. The method is advantaged in that the method is independent of measurement directions of micro-nano force values, so the micro-nano force in any space direction can be measured, and the method can be widely applied to the force measurement field.

Description

technical field [0001] The invention relates to the field of force measurement, in particular to a multi-directional micro-nano force measurement device and a measurement method. Background technique [0002] With the rapid development of modern science and technology, human beings' ability to understand the world has entered the microscopic field from the macroscopic field. Especially in recent years, with the rise of MEMS technology, the measurement of physical quantities with extremely small force values ​​has become more and more important. For example, the MEMS micro-thrusters used for attitude control in micro-nano-satellites will directly affect the accuracy of the micro-nano-satellite’s attitude control; The accuracy of the force value in the order of Newton to millineww directly determines the calculation result of the nanohardness of the material. At present, the measurement of micro-nano force values ​​is mainly concentrated in the vertical direction, but many ti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/00G01L5/00G01L11/00
CPCG01L1/005G01L5/00G01L11/00
Inventor 徐立郑培亮李倩李闯黄振宇丘卉
Owner 广东省计量科学研究院(华南国家计量测试中心)
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