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Positioning device, lithographic device and method of manufacturing an article

A positioning device and lithography technology, applied in microlithography exposure equipment, photolithography exposure device, semiconductor/solid-state device manufacturing, etc., can solve the problems of small and limited adjustable range of θZ-axis

Active Publication Date: 2021-07-09
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In the arrangement described in Japanese Patent Laid-Open No. Sho 62-152633, both X-direction positions of both ends of the intermediate stage member moving in the Y direction are constrained, severely constrained to the θZ-axis (with respect to the Z-axis -axis rotation) travel on
Therefore, in the substrate positioning apparatus having such an arrangement, the adjustable range with respect to the θZ-axis is extremely small

Method used

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  • Positioning device, lithographic device and method of manufacturing an article
  • Positioning device, lithographic device and method of manufacturing an article
  • Positioning device, lithographic device and method of manufacturing an article

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Embodiment Construction

[0022] Exemplary embodiments of the present invention will be described below with reference to the accompanying drawings.

[0023] The positioning device according to the present invention can be applied to a substrate positioning device in a lithography device such as an imprint device and an exposure device. However, it can be applied to other devices such as processing devices, inspection devices or microscopes. An example in which the positioning device according to the present invention is applied to an imprint device will be described below.

[0024] The imprint apparatus is a device that brings a mold and an imprint material arranged on a substrate into contact with each other, and applies curing energy to the imprint material, forming a pattern of a cured product on the substrate. The imprint material may be a curable composition (also called uncured resin) that is cured by receiving curing energy. The curing energy may be electromagnetic waves, heat, or the like. ...

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Abstract

The invention provides a positioning device, a photolithography device and a method for manufacturing articles. The means for moving the movable part on a plane parallel to the first direction and the second direction includes: a single guide for constraining the position of the movable part in the second direction; and a drive for driving the movable part mechanism. The movable part includes: a first movable member capable of moving in a first direction while being guided by a guide; a second movable member having a first end and a second end, the first end being connected via a rotation bearing. connected to the first movable member and movable above the surface, and a third movable member movable within a range between the first end and the second end while being guided by the second movable member . The drive mechanism includes: a first driver for driving a first end of the second movable member in a first direction, and a second driver for driving a second end of the second movable member in a first direction .

Description

technical field [0001] The invention relates to a positioning device, a photolithography device and a method for manufacturing articles. Background technique [0002] In this specification, directions are shown in an X-Y-Z coordinate system in which a horizontal plane forms an X-Y plane. It is assumed that the X direction, the Y direction and the Z direction are directions parallel to the X-axis, Y-axis and Z-axis in the X-Y-Z coordinate system, respectively. Assume that θX, θY, and θZ are rotations about the X-axis, rotation about the Y-axis, and rotation about the Z-axis, respectively. Controlling or driving about the X-axis, Y-axis, and Z-axis means controlling or driving about a direction parallel to the X-axis, a direction parallel to the Y-axis, and a direction parallel to the Z-axis, respectively. In addition, the control or driving about the θX-axis, the θY-axis and the θZ-axis means the rotation about the axis parallel to the X-axis, the rotation about the axis pa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/70758G03F7/70775G03F7/0002G03F7/70716G03F7/707H01L21/0274
Inventor 铃木健太郎是永伸茂岩谷聪
Owner CANON KK