Piezoelectric ultrasonic transducer and its preparation method
A piezoelectric ultrasonic and transducer technology, applied in the field of ultrasonic sensors, can solve the problems of high driving voltage, large parasitic capacitance, low output impedance, etc. output effect
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[0025] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0026] Such as figure 1 As shown, the piezoelectric ultrasonic transducer of this embodiment includes a substrate 1, a diaphragm 3 fixed on the substrate 1, and a first electrode 5 sequentially deposited on the diaphragm from the substrate 1 to the direction of the diaphragm 3 , piezoelectric film 6 and second electrode 7 . A cavity 10 is arranged at the center of the substrate 1 , and the diaphragm 3 covers the cavity 10 .
[0027] The diaphragm 3 includes a first diaphragm 31 located in the center and a second diaphragm 32 located outside the first diaphragm, the first diaphragm 31 and the second diaphragm 32 are spaced apart and passed through an elastic structural layer 4 connected, the elastic structure layer 4 is a hollow ring structure. The piezoelectric ultrasonic transducer is also provided with a through hole 8 through the second electrode ...
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