Piezoelectric ultrasonic transducer and its preparation method
A piezoelectric ultrasonic and transducer technology, applied in the field of ultrasonic sensors, can solve the problems of low driving voltage, low output impedance, high driving voltage, etc., and achieve increased dynamic vibration range, increased sound pressure output, and increased effective area Effect
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[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0025] Such as figure 1 As shown, the piezoelectric ultrasonic transducer of this embodiment includes a substrate 1 , a diaphragm 2 fixed on the substrate 1 , and a piezoelectric film 4 connected to the diaphragm 2 . A cavity 10 is arranged at the center of the base 1 , and the diaphragm 2 is fixed on the base 1 and covers the cavity 10 .
[0026] The piezoelectric film 4 includes a first surface 41 close to the diaphragm 2 and a second surface 42 away from the diaphragm 2 . The electrodes are electrode plates attached to the piezoelectric film 4 , specifically, including the first electrode 5 attached to the first surface 41 of the piezoelectric film 4 and the second electrode 6 arranged on the second surface 42 .
[0027] The projected area of the first electrode 5 on the diaphragm 2 is smaller than that of the diaphragm 2 . Both the second elect...
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