High-precision surface acoustic wave array sensor

An array sensor, surface acoustic wave technology, applied in instruments, fluid pressure measurement using acoustic methods, measurement devices, etc., can solve the problems of limited use environment, low repeatability, high cost, and achieve simplified calibration process and reading speed. Fast, high temporal coupling effects

Inactive Publication Date: 2017-12-26
雅泰歌思(上海)通讯科技有限公司
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Problems solved by technology

[0011] Aiming at the problem that the SAW sensor ignores the influence of other physical parameters in the sensing process, which leads to the limitation of the accuracy of the measurement results, the existing method is to limit / offset the measurement items through special SAW sensor structure design or installation position design, Then estimate the physical parameters to be measured according to the sensing principle of the physical parameters to be measured
This type of SAW sensor has a complex structure and needs to be specially customized according to different application scenarios, with low repeatability
[0012] In summary, the existing SAW sensors for multi-parameter measurement have complex structures and need to be specially customized according to different application scenarios, with low repeatability and high cost, and cannot be mass-produced; there will also be certain restrictions on the use environment. limit

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Embodiment Construction

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation manners of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention, and those skilled in the art can obtain other accompanying drawings based on these drawings and obtain other implementations.

[0041] In order to make the drawing concise, each drawing only schematically shows the parts related to the present invention, and they do not represent the actual structure of the product. In addition, to make the drawings concise and easy to understand, in some drawings, only one of the components having the same structure or function is schematically shown, or only one of them is marked. Herein, "a" not only means "only one", but also means "more than one".

[0042] In one emb...

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Abstract

The invention discloses a high-precision surface acoustic wave array sensor. The sensor comprises a substrate and at least two sensing units. Each sensing unit is fixedly arranged on the substrate. Each sensing unit comprises a piezoelectric substrate. The piezoelectric substrates of the sensing units are different. Through combination of the sensing units of the different piezoelectric substrates, a plurality of physical parameters to be measured are measured. In the invention, the piezoelectric substrates with different characteristics are used to carry out parallel measurement on the plurality of parameters at a same position. Each sensing unit adopts a time division multiplexing rule so that the parameters measured by each sensing unit possess a high time coupling degree. The sensing unit adopting the same piezoelectric substrate can be produced in a batch mode and a calibration process is simplified.

Description

technical field [0001] The invention relates to the field of surface acoustic wave sensors, in particular to a high-precision surface acoustic wave array sensor. Background technique [0002] The surface acoustic wave (Surface Acoustic Wave, SAW) sensor is a new type of sensor that uses SAW as the measured information carrier, and has the characteristics of high sensitivity, short response time, and small size. Based on its excellent performance, surface acoustic wave sensors with different functions have been developed, such as: SAW temperature sensor, SAW torque sensor, SAW gas sensor, etc. [0003] The application environment of the existing SAW sensor is limited or the measurement accuracy is low. The main reason is that the piezoelectric substrate measures a variety of physical parameters, and the measurement results are affected by a variety of physical parameters. In use, the deviation caused by physical parameters other than the target physical parameters is treated...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/25G01L11/04
CPCG01L1/255G01L11/04
Inventor 武瑞德黄鑫邱浩洋武俊安张文全
Owner 雅泰歌思(上海)通讯科技有限公司
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