Device and method for detecting surface defects of planar optical element
A technology of optical components and detection devices, applied in the direction of optical testing defects/defects, etc., can solve the problems of inability to provide defects, affecting imaging quality, energy loss, etc., and achieve the effect of improving detection efficiency and detection accuracy
Active Publication Date: 2022-03-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0002] Defects on the surface of optical components will affect the imaging quality, cause unnecessary scattering and diffraction of optical components, and cause energy loss, especially for large-aperture optical components, such as large-aperture telescopes, national ignition devices, lithography objectives, etc., will cause large energy loss
The traditional detection method of the surface topography of large-aperture optical components is mainly the visual method, but the visual method has many personal subjective factors, and long-term visual inspection will cause human eye fatigue, and at the same time, it is impossible to give a quantitative description of defects
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[0019] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0020] see Figure 1 to Figure 3 , is a structural schematic diagram of a detection device for surface defects of optical components. The detection device 100 includes a workbench 10 . The workbench 10 includes a support body 12 and a support column 14 disposed on the support body 12 . In this embodiment, the number of the support columns 14 is two, and the two support columns 14 are arranged on both sides of the support body 12, and the support body 12 and the two support columns 14 form a The receiving space 16 is roughly U-shaped.
[0021] The detection device 100 also includes ...
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The invention provides a detection device for surface defects of a planar optical element, which comprises: a working table, a pneumatic floating table, a three-axis moving slide table and a microscopic objective lens imaging device. The pneumatic floating platform is arranged on the worktable, and can rotate around its own axis at a certain angular velocity. The pneumatic floating table is used to place the optical components to be inspected. The three-axis moving slide table is arranged on the workbench. The microscopic objective lens imaging device is arranged at the end of the three-axis moving slide table, and is used for photographing the optical elements on the pneumatic floating table. The three-axis moving slide moves the microscopic objective lens imaging device to the center of the pneumatic floating platform, and drives the microscopic objective lens imaging device to move a preset distance to the edge of the pneumatic floating platform every preset time interval, until the microscopic objective lens imaging device is located on the edge of the pneumatic floating platform. The invention also provides a detection method. The invention can detect and digitally evaluate the surface defect of the optical element, and greatly improve the detection efficiency and detection precision.
Description
technical field [0001] The invention relates to a detection device and a detection method thereof, in particular to a detection device and a detection method for surface defects of planar optical elements. Background technique [0002] Defects on the surface of optical components will affect the imaging quality, cause unnecessary scattering and diffraction of optical components, and cause energy loss, especially for large-aperture optical components, such as large-aperture telescopes, national ignition devices, lithography objectives, etc., will cause Great energy loss. The traditional detection method of the surface topography of large-aperture optical components is mainly the visual method, but the visual method is largely influenced by personal subjective factors, and long-term visual inspection will cause human eye fatigue, and at the same time, it cannot give a quantitative description of defects. Contents of the invention [0003] In view of this, it is necessary to...
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IPC IPC(8): G01N21/88
Inventor 武东城杨荟琦曲艺高松涛李显凌隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI