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A kind of nickel oxide-barium titanate nanocomposite ferroelectric thin film material and its preparation method and application

A ferroelectric thin film and nanocomposite technology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of ferroelectric remanent polarization and small dielectric properties, and achieve accurate and reliable film thickness. control, good ferroelectric properties and dielectric properties, uniform grain distribution

Inactive Publication Date: 2019-06-21
HEBEI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] One of the purposes of the present invention is to provide a nickel oxide-barium titanate nanocomposite ferroelectric thin film material to solve the problem that the ferroelectric remanent polarization strength and dielectric properties of existing ferroelectric composite materials are relatively small

Method used

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  • A kind of nickel oxide-barium titanate nanocomposite ferroelectric thin film material and its preparation method and application
  • A kind of nickel oxide-barium titanate nanocomposite ferroelectric thin film material and its preparation method and application
  • A kind of nickel oxide-barium titanate nanocomposite ferroelectric thin film material and its preparation method and application

Examples

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Embodiment 1

[0069] Such as figure 1 As shown, a nickel oxide-barium titanate nanolayer composite thin film material, which includes Nb:SrTiO 3 (001) single crystal substrate 1, barium titanate thin film 2 and nickel oxide thin film 3, wherein, the volume percentage of NiO is 10%, BaTiO 3 The volume percentage is 90%.

[0070] The preparation method of the nano-layered composite film material comprises the following steps:

[0071] Barium titanate target and nickel oxide target were prepared respectively by solid powder sintering method: mix barium oxide and titanium dioxide powder according to the molar ratio Ba:Ti=1:1, press molding, and heat at 850°C~1350°C sintering at 850°C, 950°C, 1050°C, 1150°C, 1250°C and 1350°C respectively, each time sintering for 20 hours, and sintering for 6 times to obtain pure phase titanium Barium acid target; the nickel oxide powder is pressed into shape, and then sintered at 500-800 °C, the temperature is increased by 100 °C, that is, sintered at 500 °C...

Embodiment 2

[0075] A nickel oxide-barium titanate nano-layered composite film material, which includes Nb:SrTiO 3 (001) single crystal substrate 1, barium titanate thin film 2 and nickel oxide thin film 3, wherein, the volume percentage of NiO is 20%, BaTiO 3 The volume percentage is 80%.

[0076] The preparation method of the nano-layered composite film material is basically the same as that of Example 1, except that the barium titanate target is first bombarded with a laser for 20 seconds, and a barium titanate film is deposited on the substrate; then the nickel oxide target is bombarded with a laser For 100 seconds, a nickel oxide film is deposited on the barium titanate film. Repeat the aforementioned laser bombardment process 30 times, anneal in situ for 30 minutes at an atmospheric pressure, and then cool to room temperature at a rate of 2°C / min to obtain an oxide layer with a volume percentage of 20% NiO and a thickness of 160 nm. Nickel-barium titanate nanocomposite layered film...

Embodiment 3

[0079] A nickel oxide-barium titanate nano-layered composite film material, which includes Nb:SrTiO 3 (001) single crystal substrate 1, barium titanate thin film 2 and nickel oxide thin film 3, wherein, the volume percentage of NiO is 30%, BaTiO 3 The volume percentage is 70%.

[0080]The preparation method of the nano-layered composite film material is basically the same as that of Example 1, the difference is that the barium titanate target is first bombarded with a laser for 10 seconds, and the barium titanate film is deposited on the substrate; then the nickel oxide target is bombarded with a laser For 100 seconds, a nickel oxide film is deposited on the barium titanate film. Repeat the aforementioned laser bombardment process 40 times, anneal in situ for 30 minutes at an atmospheric pressure, and then cool to room temperature at a rate of 2°C / min to obtain an oxide layer with a volume percentage of 30% NiO and a thickness of 150 nm. Nickel-barium titanate nanocomposite ...

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Abstract

The invention provides a nickel oxide and barium titanate nano composite ferroelectric film material and a preparation method and application thereof. A film has the (001) face crystal orientation andcomprises, by volume percentage, 10-30% of nickel oxide and 70-90% of barium titanate. The preparation method comprises the steps of preparing the barium titanate, the nickel oxide and a nickel oxideand barium titanate composite target material through a solid phase deposition method; and then adopting a pulsed laser deposition method, and preparing the nano layered nickel oxide and barium titanate nano composite ferroelectric film, the nano columnar nickel oxide and barium titanate nano composite ferroelectric film and the nano granulated nickel oxide and barium titanate nano composite ferroelectric film by controlling deposition parameters. The nickel oxide and barium titanate nano composite ferroelectric film material and the preparation method and application thereof are simple in process. The obtained nano composite film has the beneficial effects that the microstructure is continuous and adjustable; nanoscale crystalline grains are distributed uniformly; the film thickness canbe controlled precisely; and crystal orientation extends outwards. Ferroelectric performance of the composite film material is effectively improved; dielectric performance is enhanced; the obtained high-performance material can be applied to the fields of ferroelectric storage devices, supercapacitors, crystalline field effect tubes, acoustic surface wave devices and the like; and the applicationscope is wide.

Description

technical field [0001] The invention relates to a ferroelectric thin film material, in particular to a nickel oxide-barium titanate nanocomposite ferroelectric thin film material and its preparation method and application. Background technique [0002] Ferroelectric thin film materials are a kind of functional thin film materials with spontaneous polarization, and the vector of spontaneous polarization can be turned with the external electric field. With the development of thin film preparation technology and the increasing demand for device miniaturization, barium titanate (BaTiO 3 , BTO), lead zirconate titanate (Pb(Zr,Ti)O 3 , PZT), bismuth ferrite (BiFeO 3 , BFO) and other ferroelectric thin film materials have excellent properties such as photoelectric effect and piezoelectric effect, and are widely used in the field of ferroelectric integrated electronic components such as ferroelectric memory devices, crystal field effect transistors, and surface acoustic wave devic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/08C23C14/28
Inventor 宁兴坤陈明敬王淑芳傅广生
Owner HEBEI UNIVERSITY
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