Stress-free clamping flexible device for high-precision standard lenses

A flexible device and standard mirror technology, applied in installation, optics, instruments, etc., can solve the problems of thermal stress, clamping stress and adhesive stress of standard mirrors, so as to solve the influence of adhesive, ensure versatility, reduce face shape effect

Pending Publication Date: 2018-01-23
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The purpose of this invention is to propose a flexible structure design for stress-free clamping, which is used for the support of standard mirror

Method used

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  • Stress-free clamping flexible device for high-precision standard lenses
  • Stress-free clamping flexible device for high-precision standard lenses

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Embodiment Construction

[0027] The invention will be further described below in conjunction with the drawings.

[0028] Such as figure 1 As shown, the present invention includes a standard lens frame 2, a flexible frame 3, and a pressure ring 4. The standard mirror 1 is fixed in the flexible frame 3, the flexible frame 3 is sleeved in the standard mirror frame 2, and the pressing ring 4 presses the flexible frame 3.

[0029] From figure 2 It can be seen that the flexible frame of the present invention is provided with a plurality of arc-shaped slits 31 with the same radius. The slits divide the flexible frame into an inner ring 32 and an outer ring 33, and the inner ring and the outer ring are connected by a flexible member 34.

[0030] The specific development process is as follows:

[0031] First, perform the optical processing of the standard mirror 1 bare mirror, and the surface shape is required to reach 1 / 50λ;

[0032] Then complete the fixing of the standard mirror 1 and the flexible frame 3. The sta...

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Abstract

The invention relates to a stress-free clamping flexible device for high-precision standard lenses, which includes a flexible frame, a pressing ring, and a standard lens frame. The flexible frame is provided with a plurality of circular arc slits of the same radius which divide the flexible frame into an inner ring and an outer ring, and the inner ring and the outer ring are connected by a flexible member. Multiple injection holes are arranged in the side of the inner ring of the flexible frame. A standard lens is fixed to the inner ring of the flexible frame through adhesive in the injectionholes. The standard lens frame is a barrel-shaped part with a round hole in the bottom, and the radius of the round hole is smaller than that of the standard lens. The flexible frame is sheathed in the standard lens frame. The joint portion of the bottom of the standard lens frame and one end face of the outer ring of the flexible frame is provided with a boss. The pressing ring is arranged on theother end face of the outer ring of the flexible frame. The joint portion of the pressing ring and the outer ring of the flexible frame is provided with a boss. The standard lens frame is provided with a standard interface connected with an interferometer. The thermal characteristic mismatch between the standard lens and the supporting structure thereof is compensated through the deformation of the flexible structure. The influence of temperature change on the surface shape is reduced.

Description

Technical field [0001] The invention relates to a stress-free clamping flexible device design, in particular to a stress-free clamping flexible device design for supporting a high-precision standard mirror. Background technique [0002] With the improvement of the accuracy of optical instruments, the requirements for surface shape detection of optical components are getting higher and higher. The interferometer is currently the main technical means used for the surface shape detection of optical components. The interference fringes between the reference surface and the surface to be measured are used to measure the surface shape of the surface to be measured. The measurement accuracy mainly depends on the accuracy of the reference surface. Therefore, the quality of the standard interferometer lens becomes an important factor restricting the detection accuracy of optical components. The surface shape accuracy of the standard surface used for high-precision detection usually reach...

Claims

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Application Information

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IPC IPC(8): G02B7/00
Inventor 丁蛟腾许亮马臻罗瑶凤良杰庞志海
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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