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Apparatus for detecting edge defects of double layer substrate and detection method thereof

A double-layer substrate, edge defect technology, applied in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. The effect of accurate detection results

Pending Publication Date: 2018-03-27
SUZHOU JINGLAI OPTO CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is: the existing optical detection device can only detect the defect on the edge of the single-layer object to be tested, and cannot effectively detect the double-layer substrate

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  • Apparatus for detecting edge defects of double layer substrate and detection method thereof
  • Apparatus for detecting edge defects of double layer substrate and detection method thereof
  • Apparatus for detecting edge defects of double layer substrate and detection method thereof

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Embodiment Construction

[0026] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.

[0027] Such as figure 1 As shown, the embodiment of the present invention provides a device for detecting edge defects of a double-layer substrate, wherein the double-layer substrate 2 includes a first substrate 201 and a second substrate 202 arranged parallel thereto, and also includes a detection device 1 and an illumination unit 3 , the detection device 1 is arranged on one side of the double-layer substrate 2, the illumination unit 3 is arranged on the other side of the double-layer substrate 2, the detection device 1 includes a first camera unit 101 and a second camera unit 102, and the first camera unit 101 The first centerline of the first camera unit ...

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Abstract

The invention relates to an apparatus for detecting edge defects of a double layer substrate and a detection method thereof. The apparatus comprises a first shooting unit and a second shooting unit, and a first included angle and a second included angle are respectively formed between a first center line of the first shooting unit and a second center line of the second shooting unit as well as a normal plane at the substrate edge; light emitted from an illumination unit passes through the edge of the double layer substrate and reaches the first shooting unit and the second shooting unit, in order to avoid mutual interference between a first substrate and a second substrate, directly detect edge defects of the double layer substrate by means of image analysis detection, and the apparatus has the advantages of detection result accuracy and rapid detection.

Description

technical field [0001] The invention relates to a device and a detection method for detecting edge defects of a double-layer substrate, belonging to the technical field of display panel detection equipment. Background technique [0002] In the production process of display panels, it is usually necessary to inspect the glass edge of the panel to determine whether there are abnormalities such as splits, scratches, and damage on the edge of the glass substrate, and to take timely measures to prevent the abnormal substrate from affecting the subsequent production process. In the past panel production, due to the relatively small glass size and relatively low production capacity requirements, the glass is usually handled, transferred and inspected in a single piece; During the inspection, it is only necessary to transfer the robotic arm carrying the single-layer glass to the bottom of the inspection unit (such as a CCD camera) for photo inspection, and complete the edge inspecti...

Claims

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Application Information

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IPC IPC(8): G01N21/95G01N21/958
CPCG01N21/95G01N21/958G01N2021/9513
Inventor 杨凯峰杨慎东郭连俊
Owner SUZHOU JINGLAI OPTO CO LTD
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