Apparatus for detecting edge defects of double layer substrate and detection method thereof

A double-layer substrate, edge defect technology, applied in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. The effect of accurate detection results

Pending Publication Date: 2018-03-27
SUZHOU JINGLAI OPTO CO LTD
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is: the existing optical detection device can only dete

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  • Apparatus for detecting edge defects of double layer substrate and detection method thereof
  • Apparatus for detecting edge defects of double layer substrate and detection method thereof
  • Apparatus for detecting edge defects of double layer substrate and detection method thereof

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[0026] The present invention will now be described in further detail with reference to the drawings. These drawings are all simplified schematic diagrams, which merely illustrate the basic structure of the present invention in a schematic manner, so they only show the structures related to the present invention.

[0027] Such as figure 1 As shown, the device for detecting edge defects of a double-layer substrate provided by an embodiment of the present invention, wherein the double-layer substrate 2 includes a first substrate 201 and a second substrate 202 arranged in parallel therewith, and also includes a detection device 1 and a lighting unit 3 , The detection device 1 is provided on one side of the double-layer substrate 2, and the lighting unit 3 is provided on the other side of the double-layer substrate 2. The detection device 1 includes a first camera unit 101 and a second camera unit 102, and the first camera unit 101 The first centerline of the first camera unit 102 and...

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Abstract

The invention relates to a device for detecting edge defects of a double-layer substrate and a detection method thereof, comprising a first camera unit and a second camera unit, and the first center line of the first camera unit and the first center line of the second camera unit The two center lines respectively form a first angle and a second angle with the plane of the normal line of the substrate edge; the light emitted by the illumination unit reaches the first camera unit and the second camera unit through the edge of the double-layer substrate, thereby avoiding the first substrate and the second camera unit. The mutual interference of the second substrate can directly detect the defects on the edge of the double-layer substrate through image analysis, which has the advantages of accurate detection results and fast detection.

Description

technical field [0001] The invention relates to a device and a detection method for detecting edge defects of a double-layer substrate, belonging to the technical field of display panel detection equipment. Background technique [0002] In the production process of display panels, it is usually necessary to inspect the glass edge of the panel to determine whether there are abnormalities such as splits, scratches, and damage on the edge of the glass substrate, and to take timely measures to prevent the abnormal substrate from affecting the subsequent production process. In the past panel production, due to the relatively small glass size and relatively low production capacity requirements, the glass is usually handled, transferred and inspected in a single piece; During the inspection, it is only necessary to transfer the robotic arm carrying the single-layer glass to the bottom of the inspection unit (such as a CCD camera) for photo inspection, and complete the edge inspecti...

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Application Information

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IPC IPC(8): G01N21/95G01N21/958
CPCG01N21/95G01N21/958G01N2021/9513
Inventor 杨凯峰杨慎东郭连俊
Owner SUZHOU JINGLAI OPTO CO LTD
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