Deposition aparatus and organic matter deposition method using same

A deposition device and mask technology, which is applied in the directions of ion implantation plating, coating, electrical components, etc., can solve the problems of increasing the cost of preparation devices, and achieve the effect of improving uneven deposition

Active Publication Date: 2018-04-06
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] As described above, if a deposition apparatus and a deposition apparatus are prepared for various target substrate sizes and cell sizes in consideration of the target substrate size, the cost of preparing the apparatus may increase

Method used

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  • Deposition aparatus and organic matter deposition method using same
  • Deposition aparatus and organic matter deposition method using same
  • Deposition aparatus and organic matter deposition method using same

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Embodiment Construction

[0044] With reference to the embodiments described in detail below in conjunction with the accompanying drawings, the advantages and features of the present invention and the methods for realizing the advantages and features will become clear. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms different from each other. These embodiments are provided only to complete the disclosure of the present invention and to fully inform those skilled in the art to which the present invention belongs, and the present invention is only defined by the scope of the claims.

[0045] For convenience of description, the size and thickness of each structure shown in the drawings are arbitrarily shown, so the present invention is not necessarily limited to the scope shown in the drawings. "And / or" includes each and all combinations of more than one of the mentioned items.

[0046] Hereinafter, embodiments of the present invention ...

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Abstract

The invention relates to a deposition apparatus and a deposition method using the same. The deposition apparatus comprises a mask unit, a first plate and a pressure applying unit. The first plate is arranged on the mask unit and is separated from the mask unit. The pressure applying unit is independent of the first plate; the pressure applying unit moves along one surface of the first plate and applies pressure to partial region of a surface of a target substrate; the first plate comprises a pressure applying fixing portion which is arranged on one surface of the first plate for connection ofthe pressure applying unit.

Description

Technical field [0001] The invention relates to a deposition device and an organic matter deposition method using the deposition device. Background technique [0002] Organic light emitting display (OLED) devices are capable of displaying light generated by combining holes and electrons provided by an anode and a cathode, respectively, in an organic light-emitting layer located between these electrodes. Display device for information such as images and text. [0003] The organic light emitting display device forms an organic light emitting layer and intermediate layers such as an electron injection layer, an electron transport layer, a hole transport layer, and a hole injection layer between the above-mentioned electrodes to obtain high-efficiency light emission. [0004] Generally, the organic light emitting layer and the intermediate layer are formed using a mask including a fine metal mask (FMM), where the fine metal mask has a deposition pattern. However, fine metal masks tend ...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/50
CPCC23C14/042C23C14/12C23C14/50H10K71/166H10K71/00
Inventor 高晙赫姜敏求
Owner SAMSUNG DISPLAY CO LTD
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