A high-precision laser processing device and system

A laser processing and high-precision technology, applied in the fields of high-precision laser processing of devices, high-precision laser methods and devices, can solve existing problems, achieve the effects of simple operation, improved processing resolution, and reduced heat accumulation effect

Active Publication Date: 2020-03-31
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the heat-affected layer of the processed workpiece due to the heat accumulation effect still exists

Method used

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  • A high-precision laser processing device and system
  • A high-precision laser processing device and system
  • A high-precision laser processing device and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] The material processing process of the high-precision laser processing device and system provided by this application is as attached figure 1 , attached figure 2 and attached Image 6 shown.

[0037] First, the system control parameters are transmitted to the control system through the input signal, and the control system controls the laser to turn on and the system to move; the optical element is a combination of multiple sets of total reflection mirrors. After the laser is turned on, the laser beam uses the optical element to achieve parallel beam transmission;

[0038] The transmitted parallel laser beam enters the frustum of the frustum from the bottom surface of the frustum of the cone (geometrically large circle), with the structural axis of the frustum of the cone as the center of the circle, and the radius of rotation of the beam is R1; the outer wall of the frustum of the cone has a total reflection coating , the light beam undergoes the first total reflecti...

Embodiment 2

[0045] The high-precision laser processing device and system provided by this application can not only use parallel beams, but also use focused beams. The process of focusing beam materials is shown in the attached image 3 , attached Figure 4 and attached Image 6 shown.

[0046] First, the system control parameters are transmitted to the control system through the input signal, and the control system controls the laser to turn on and the system to move; the optical element is a combination of multiple sets of total reflection mirrors and focusing lenses. After the laser is turned on, the laser beam will use the optical element to achieve parallel beam transmission. converge with light;

[0047] The transmitted focused laser beam enters the frustum reflector from the bottom surface of the frustum reflector (geometrically large circular surface); total reflection;

[0048] The interior of the frustum mirror is coated with a total reflection coating inside the conical hole a...

Embodiment 3

[0054] The above-mentioned embodiment 1 and embodiment 2 are processing schemes for micro-scale structures. In addition, the material processing process for super-large-scale structures is as follows: Figure 5 and Image 6 shown.

[0055] First, the system control parameters are transmitted to the control system through the input signal, and the control system controls the laser to turn on and the system to move; the optical element is a combination of multiple sets of total reflection mirrors and focusing lenses. After the laser is turned on, the laser beam will use the optical element to achieve parallel beam transmission. converge with light;

[0056] The transmitted laser beam enters the conical frustum reflector from the top surface (geometric facet) of the conical frustum reflector;

[0057] The interior of the conical mirror is coated with a total reflection coating inside the conical hole at the axial position, and the light beam undergoes the first total reflection...

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Abstract

The invention discloses a high-precision laser processing device and system. The high-precision laser processing device comprises a cone-frustum reflector and is characterized in that the cone-frustumreflector comprises a first conical face located on the outer side and a second conical face located on the axis of the cone frustum; each of the first conical face and the second conical face is coated with a total-reflection coating layer. The high-precision laser processing device and system has the advantages that by using the high-precision laser processing device and system, the scanning speed limit and processing dimension limit of the original laser processing technology are broken through, a heat accumulation effect can be reduced effectively, the effective range of laser processingis expanded, laser-beam processing resolution is improved, and high-precision processing of ultra-large and small-scale structures is achieved; the high-precision laser processing device and system issimple to operate, low in cost, efficient, reliable and the like.

Description

technical field [0001] The present application relates to a high-precision laser method and device, in particular to a method and device capable of realizing high-precision laser processing of devices, and belongs to the technical field of laser processing. Background technique [0002] At present, the processing accuracy of known laser processing equipment is mainly limited by the accuracy of the mechanical motion system. When processing structures such as holes and grooves larger than 30 μm, high-precision processing can be achieved. However, in the processing of micron-scale and nano-scale structures and super-large-scale structures, the conventional mechanical control system and laser processing accuracy have been unable to meet their scale requirements and accuracy requirements. [0003] The repetition rate of existing lasers can be as high as 1 MHz, and the spot diameter is about 50 μm. During the working process of the high-frequency laser, its heat accumulation effe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/36B23K26/082B23K26/064
CPCB23K26/064B23K26/082B23K26/38
Inventor 张文武张广义
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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