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Atomic force microscope-based detection platform

An atomic force microscope and detection platform technology, applied in scanning probe microscopy, measuring devices, instruments, etc., can solve the problems of poor universality of detection platforms and inaccurate detection results, and achieve the effect of improving versatility and accuracy.

Active Publication Date: 2021-03-26
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention mainly provides a detection platform based on an atomic force microscope, which aims to solve the problem of poor versatility of the detection platform due to the limitation of the size of the sample to be tested and inaccurate detection results caused by the sample being affected by moisture and airflow in the air. The problem

Method used

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  • Atomic force microscope-based detection platform
  • Atomic force microscope-based detection platform
  • Atomic force microscope-based detection platform

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Embodiment Construction

[0017] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0018] The terms "first", "second", etc. in the present invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "include" and "have", as well as any ...

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Abstract

The invention discloses a detecting platform based on an atomic force microscope. The detecting platform comprises a base table and a cavity unit, wherein a to-be-detected sample is placed on the basetable; the cavity unit comprises an annular wall; and the annular wall is used for pressing the to-be-detected sample so that the to-be-detected sample is positioned on the base table in a pressed manner. By the mode, the universality of the detecting platform can be improved, and the accuracy of a detecting result can also be improved.

Description

technical field [0001] The invention relates to the technical field of detection equipment, in particular to a detection platform based on an atomic force microscope. Background technique [0002] In the manufacturing process of display panels, each manufacturing process has a crucial impact on the performance of the product. Therefore, it is very important to monitor the quality of products in each manufacturing process. [0003] An atomic force microscope is an analytical instrument that can be used to study the surface structure of solid materials, including insulators. The atomic force microscope studies the surface structure and properties of substances by detecting the extremely weak interatomic interaction between the surface of the sample to be tested and a miniature force sensitive element. One end of a pair of microcantilever that is extremely sensitive to weak force is fixed, and the probe at the other end is close to the sample. At this time, the probe will int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24
CPCG01Q60/24
Inventor 张维维
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD