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A method of prolonging the service life of a-plane sapphire window polishing fluid

A sapphire and polishing liquid technology, applied in the direction of material electrochemical variables, etc., can solve the problems of low polishing efficiency, increase production cost, high sapphire hardness, and achieve the effect of reducing use cost, prolonging service life, and improving Zeta potential

Active Publication Date: 2020-02-07
HEBEI YUTIAN HAOYUAN NANO MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Due to the high hardness and high brittleness of A-face sapphire, it is difficult to machine, and there are common problems in the process of processing A-face sapphire workpieces, such as low polishing efficiency, high wafer surface roughness, and excessive loss of auxiliary materials. The amount of polishing fluid used increases production costs and limits the development of the A-side sapphire industry

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] The formula of the A-surface sapphire window polishing liquid used in this example is 90 parts of silica sol, 0.05 parts of ethanolamine, 0.05 parts of polyethylene glycol 400, 1.5 parts of potassium chloride, 0.05 parts of hydrogen peroxide, and 1.5 parts of sodium hydroxide , and the balance is deionized water. For the specific preparation process, please refer to the patent in the application number 2015109168515. Prepare with deionized water at a volume ratio of 1:1 to obtain a prepared A-face sapphire window polishing solution. The chemical mechanical polishing experiment was carried out using the polishing equipment CP4 of CETR Company of the United States.

[0024] Before the A-side sapphire is chemically mechanically polished, add a sufficient amount of A-side sapphire window polishing solution into the polishing solution container, and start chemical mechanical polishing. Take about 3mL of polishing solution every 1 hour, and use a Zeta potential analyzer Meas...

Embodiment 2

[0027] The A-side sapphire window polishing solution used in this example is the 100nm A-side sapphire polishing stock solution produced by Chuangli Grinding Technology Co., Ltd. The stock solution and deionized water are configured according to the volume ratio of 1:1, and the configured A - Surface the sapphire window polishing solution and conduct chemical mechanical polishing test.

[0028] Before the A-side sapphire is chemically mechanically polished, add a sufficient amount of A-side sapphire window polishing solution into the polishing solution container, and start chemical mechanical polishing. After working for 6 hours, take about 3mL of polishing solution every 1 hour, and use The Zeta Potential Analyzer measured its potential. After about 7 hours of polishing, the absolute value of the Zeta potential of the A-side sapphire window polishing liquid was monitored to be 17.6mv, indicating that the stability of the colloid in the polishing liquid deteriorated, and the A-...

Embodiment 3

[0031]The A-side sapphire window polishing liquid used in this embodiment and the equipment used, the method of prolonging life are the same as in Example 1, the difference is that the nonionic surfactant added in this embodiment is dodecyl polyethylene glycol A mixture of alcohol carboxylate and fatty alcohol polyoxyethylene ether in a volume ratio of 1:5.

[0032] Above-mentioned embodiment all can effectively prolong the service life of existing A-surface sapphire window polishing liquid, and the added nonionic surfactant can all play the effect of improving the Zeta potential of polishing liquid and the colloidal stability of polishing liquid, improves polishing liquid The removal rate can significantly extend the service life of the polishing liquid to more than 12 hours, and can reduce the use cost of the existing polishing liquid for manufacturers by almost 30%, and the economic benefits are considerable.

[0033] What is not mentioned in the present invention is applic...

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PUM

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Abstract

The invention relates to a method for prolonging the service life of an A-plane sapphire window polishing fluid. The method comprises the following processes: 1), during chemical and mechanical polishing of an A-plane sapphire, taking the A-plane sapphire window polishing fluid, and measuring the potential by using a Zeta potential analyzer to monitor the change condition of the Zeta potential ofthe A-plane sapphire window polishing fluid; 2), when the absolute value of the Zeta potential of the A-plane sapphire window polishing fluid is monitored to be not higher than 18 mv, directly addinga non-ionic surfactant into the A-plane sapphire window polishing fluid in use, when the absolute value of the Zeta potential of the A-plane sapphire window polishing fluid is not lower than 25.0 mv,stopping adding, then monitoring the Zeta potential once every 0.5-1.5 hours, and repeating the process, wherein the non-ionic surfactant is one or a mixture of several of fatty acid methyl ester ethoxylate, dodecyl polyethylene glycol carboxylate and fatty alcohol polyoxyethylene ether which can increase the Zeta potential of the polishing fluid and do not adversely react with the polishing fluidafter addition.

Description

technical field [0001] The invention relates to the technical field of sapphire window polishing, in particular to a method for prolonging the service life of an A-plane sapphire window polishing solution by controlling Zeta potential. Background technique [0002] Artificially Produced A-face Sapphire Single Crystal α-Al 2 o 3 It has good wear resistance, its hardness is second only to diamond's Damok's grade 9, and it still has good stability at high temperatures. Therefore, it is more and more widely used in mobile phones, watch screens, infrared and far-infrared military equipment, windows of high-power lasers, various optical prisms, optical windows and other fields. [0003] The mechanical properties of single crystal sapphire are related to its own density. The higher the density of single crystal sapphire, the better the mechanical properties. Compared with the C-oriented sapphire wafer, the atomic density of the A-plane sapphire wafer is higher, and its hardness i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/26
CPCG01N27/26
Inventor 杜志伟王军强
Owner HEBEI YUTIAN HAOYUAN NANO MATERIAL
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