Method for prolonging service life of A-plane sapphire window polishing fluid
A technology of sapphire and polishing fluid, which is applied in the direction of material electrochemical variables, can solve the problems of increased production cost, low polishing efficiency, and high hardness of sapphire, and achieve the effects of prolonging service life, reducing use cost, and improving Zeta potential
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Embodiment 1
[0023] The formula of the A-surface sapphire window polishing liquid used in this example is 90 parts of silica sol, 0.05 parts of ethanolamine, 0.05 parts of polyethylene glycol 400, 1.5 parts of potassium chloride, 0.05 parts of hydrogen peroxide, and 1.5 parts of sodium hydroxide , and the balance is deionized water. For the specific preparation process, please refer to the patent in the application number 2015109168515. Prepare with deionized water at a volume ratio of 1:1 to obtain a prepared A-face sapphire window polishing solution. The chemical mechanical polishing experiment was carried out using the polishing equipment CP4 of CETR Company of the United States.
[0024] Before the A-side sapphire is chemically mechanically polished, add a sufficient amount of A-side sapphire window polishing solution into the polishing solution container, and start chemical mechanical polishing. Take about 3mL of polishing solution every 1 hour, and use a Zeta potential analyzer Meas...
Embodiment 2
[0027] The A-side sapphire window polishing solution used in this example is the 100nm A-side sapphire polishing stock solution produced by Chuangli Grinding Technology Co., Ltd. The stock solution and deionized water are configured according to the volume ratio of 1:1, and the configured A - Surface the sapphire window polishing solution and conduct chemical mechanical polishing test.
[0028] Before the A-side sapphire is chemically mechanically polished, add a sufficient amount of A-side sapphire window polishing solution into the polishing solution container, and start chemical mechanical polishing. After working for 6 hours, take about 3mL of polishing solution every 1 hour, and use The Zeta Potential Analyzer measured its potential. After about 7 hours of polishing, the absolute value of the Zeta potential of the A-side sapphire window polishing liquid was monitored to be 17.6mv, indicating that the stability of the colloid in the polishing liquid deteriorated, and the A-...
Embodiment 3
[0031]The A-side sapphire window polishing liquid used in this embodiment and the equipment used, the method of prolonging life are the same as in Example 1, the difference is that the nonionic surfactant added in this embodiment is dodecyl polyethylene glycol A mixture of alcohol carboxylate and fatty alcohol polyoxyethylene ether in a volume ratio of 1:5.
[0032] Above-mentioned embodiment all can effectively prolong the service life of existing A-surface sapphire window polishing liquid, and the added nonionic surfactant can all play the effect of improving the Zeta potential of polishing liquid and the colloidal stability of polishing liquid, improves polishing liquid The removal rate can significantly extend the service life of the polishing liquid to more than 12 hours, and can reduce the use cost of the existing polishing liquid for manufacturers by almost 30%, and the economic benefits are considerable.
[0033] What is not mentioned in the present invention is applic...
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