Dynamic modeling method for detecting aspheric surface through axial scanning optical interference method
A modeling method and aspheric technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve problems such as difficulty in obtaining the optical path of the detector, deviation between simulation and real experiments, etc.
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[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0030] combine figure 1 and figure 2 , a dynamic modeling method for detecting an aspheric surface using axial scanning light interferometry, the method steps are as follows:
[0031] Step 1. Build the interferometer model:
[0032] Use zemax software to build an interferometer model, the wavelength of the laser light source used is 632.8nm, and the interferometer model includes a polarizer 1, a light source beam expander 2, a polarizing beam splitter 3, a quarter-wave plate 4, and a collimator lens group 5 , standard spherical lens group 6, aspheric mirror to be tested 7, pinhole diaphragm 8, imaging lens group 9 and CCD10; the common optical axis is arranged in sequence CCD10, imaging lens group 9, pinhole diaphragm 8, polarizing beam splitter 3, four One-third wave plate 4, collimating lens group 5, standard spherical lens group 6 and to-be-measured as...
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