Portable Profiler and Profile Scanning Microscopes and Systems

Abstract

The invention discloses a portable contourgraph and a contour scanning microscope and system. The contourgraph comprises a triaxial piezoelectric ceramic scanning tube which is composed of X-direction, Y-direction and Z-direction piezoelectric ceramic drivers. Each piezoelectric ceramic driver comprises a flexible amplification mechanism and piezoelectric ceramics. The flexible amplification mechanism is provided with a fixed end and a moving end and is set in a way that the moving end is enabled to produce linear displacement for amplifying the deformation of the piezoelectric ceramics. The X-direction, Y-direction and Z-direction piezoelectric ceramic drivers and a capacitance differential sensor are connected in series in turn, and the X-direction, Y-direction and Z-direction piezoelectric ceramic drivers are arranged on the position enabling the corresponding moving ends to produce linear displacement along the X, Y and Z directions. The capacitance differential sensor comprises atarget member, a probe and two sensing members. The probe is fixedly connected with the target member along the Z direction. Each of the two sensing members and the target member form a unipolar capacitor. The contourgraph has the advantages of small size, low cost and high resolution.

Description

technical field [0001] The present invention relates to the technical field of profiler, more specifically, the present invention relates to a portable profiler, a profile scanning microscope with a portable profiler, and a profile scanning system that utilizes a portable profiler or a profiler to scan the profile of a sample to be measured . Background technique [0002] A profiler is an instrument used to characterize the surface topography of an object. According to the measurement principle, it can be divided into two categories. One is a profiler that uses an optical method for measurement, and the other is a profiler that uses a contact method for measurement. Optical methods include white light interferometry, phase shifting interferometry, focus detection, pattern projection, etc. Optical methods have the advantages of fast speed, high reliability, and high lateral resolution, but they need to build a more complex optical system, so It occupies a large volume, is no...

AI Technical Summary

Problems solved by technology

Optical methods include white light interferometry, phase-shift interferometry, focus detection, pattern projection, etc. Optical methods have the advantages of fast speed, high reliability, and high lateral resolution, but they need to build a more complex optical system, so It occupies a large volume, is not easy to carry, and is easily affected by the environment, and the price is relatively high

The contact methods mainly include atomic force microscope and scanning tunneling microscope. Both atomic force microscope and scanning tunneling microscope use the principle of optical lever to realize the feedback of displacement and force. They have the advantages of high resolution, good reliability and wide application range, but they also need to build The more complex system is used as a support, which is bulky, not easy to carry, and the price is higher

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