Intermediate image plane detection device and method for large-aperture reflection optical system
A reflective optics and detection device technology, which is applied in the field of intermediate image surface detection devices of large-diameter reflective optical systems, can solve problems such as imperfect imaging and single detection field of view.
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[0042] The present invention will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, and do not limit the present invention.
[0043] figure 1 Shown is a schematic diagram of the basic structure of the intermediate image plane detection device of the large-aperture reflective optical system of the present invention. The device includes an interferometric autocollimator 1, an interferometer 5, and a diffraction flat plate 3;
[0044] The interferometric self-collimating plane mirror 1 is set directly in front of the secondary mirror 2 of the large-aperture reflective optical system to be measured, the interferometer 5 is set directly behind the primary mirror 7 of the large-aperture reflective optical system to be measured, and the diffraction plate 3 is set on the large-aperture reflective Between the intermediate image plane 4 f...
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