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A Method for Determining the Parallel Position of a Single Chip

A determination method, single-chip technology, applied in image analysis, image enhancement, instruments, etc., can solve the problems of increasing alignment time, reducing alignment accuracy and reliability, placement position, angle deviation, etc., to improve alignment accuracy , the effect of reducing the alignment time

Active Publication Date: 2020-07-03
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, manual operation is required when the chip is placed on the workbench, resulting in a certain range of deviations in the placement position and angle, resulting in the need to search for alignment points in a wide range during identification, which increases the alignment time and reduces production efficiency.
At the same time, the traditional chip position is determined using the first row straightening algorithm. This method requires two chips at the first and the last. When the chip is placed at a large angle, it is easy to cause the left and right sides of the chip to find points that are not in the same row, resulting in the chip being straightened. errors, reducing alignment accuracy and reliability

Method used

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  • A Method for Determining the Parallel Position of a Single Chip
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Embodiment Construction

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.

[0029] The method for determining the parallel position of a single chip according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] Such as Figure 1 to Figure 2 As shown, the method for determining the parallel position of a single chip according to an embodiment of the present invention includes the followin...

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Abstract

The invention provides a parallel position determination method of a single chip. The parallel position determination method of the single chip comprises the steps of 1, determining an image templateand coordinate of an image template alignment point; 2, finding out a chip image of a corresponding position by the image template; 3, comparing the coordinate of the image template alignment point with coordinate of a chip image alignment point to obtain an angle deviation value between the chip image and the image template and a deviation value between the chip image alignment point and the image template alignment point so as to obtain coordinate A (m, n) of the chip image alignment point A and an angle Beta of the alignment point A in a coordinate system; and 4, obtaining coordinate B (x,y) of the chip image alignment point when the chip image alignment point is rotated to a parallel position according to the angle deviation valve and the coordinate deviation value of the chip image alignment point A. According to the parallel position determination method provided by the embodiment of the invention, straightening calculation is performed on an arbitrary alignment point, the parallel position of the chip is conveniently and rapidly determined, the alignment time is reduced, and the alignment accuracy is improved.

Description

technical field [0001] The invention relates to the field of dicing machines, in particular to a method for determining the parallel position of a single chip. Background technique [0002] In the field of semi-automatic scribing technology, semi-automatic scribing equipment is usually used to calibrate the chip position visually to find out the position and angle of the first chip. This method is fast and easy to operate. However, manual operation is required when the chip is placed on the workbench, resulting in a certain range of deviations in the placement position and angle, resulting in the need to search for alignment points in a wide range during identification, increasing the alignment time and reducing production efficiency. At the same time, the traditional chip position is determined using the first row straightening algorithm. This method requires two chips at the first and the last. When the chip is placed at a large angle, it is easy to cause the left and righ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68G06T7/70
CPCG06T7/70G06T2207/30148H01L21/682
Inventor 孙彬周文静夏志伟刘婷婷侯佳丽颜剡孟庆嵩
Owner CETC BEIJING ELECTRONICS EQUIP