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Production device of ultraviolet negative photoresist for integrated circuit
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A technology of negative photoresist and integrated circuit, which is applied in the field of production equipment of integrated circuit ultraviolet negative photoresist, and can solve problems such as complex production equipment
Inactive Publication Date: 2018-07-03
CHENGDU SI BO LI TECH CO LTD
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Problems solved by technology
Most of the existing production devices are relatively complicated. The ultraviolet negative photoresist is used as an integrated circuit photores
Method used
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[0008] Production raw materials and dosage
[0009]
[0010] The production equipment of integrated circuit ultraviolet negative photoresist mainly includes: sol kettle (D101), cyclization kettle (D102), freezer (L101), glue mixing kettle (D103), filter (L102), 100-level super Clean room (L103), wherein, the cyclization kettle (D102) is connected with the sol kettle (D101) and the freezer (L101) respectively, and the filter (L102) is connected with the glue mixing kettle (D103) and the 100-class ultra-clean room ( L103) are connected, among which, the nominal volume of the sol kettle (D101) is 420L, the diameter of the inner pot of the cyclization kettle (D102) is 850mm, and the filter membrane pore size of the class 100 ultra-clean room (L103) is 0.11μm.
[0011] The production device of integrated circuit UV negative photoresist, the production process is as follows: add polyisoprene and xylene into the sol kettle D101, stir at 30°C to fully dissolve the polyisoprene. Th...
example 2
[0015] Production raw materials and dosage
[0016]
[0017]
[0018] The production equipment of integrated circuit ultraviolet negative photoresist mainly includes: sol kettle (D101), cyclization kettle (D102), freezer (L101), glue mixing kettle (D103), filter (L102), 100-level super Clean room (L103), wherein, the cyclization kettle (D102) is connected with the sol kettle (D101) and the freezer (L101) respectively, and the filter (L102) is connected with the glue mixing kettle (D103) and the 100-class ultra-clean room ( L103) are connected, among which, the nominal volume of the sol kettle (D101) is 450L, the diameter of the inner pot of the cyclization kettle (D102) is 900mm, and the filter membrane pore size of the class 100 ultra-clean room (L103) is 0.12μm.
[0019] The production device of integrated circuit UV negative photoresist, the production process is as follows: add polyisoprene and xylene into the sol kettle D101, stir at 36°C to fully dissolve the polyi...
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Abstract
The invention relates to a production device of an ultraviolet negative photoresist for an integrated circuit. The production device mainly comprises a glue dissolving kettle (D101), a cyclizing kettle (D102), a freezing chamber (L101), a glue blending kettle (D103), a filter machine (L102) and a hundred-stage ultra-clean chamber (L103), wherein the cyclizing kettle (D102) is connected with the glue dissolving kettle (D101) and the freezing chamber (L101) respectively, and the filter machine (L102) is connected with the glue blending kettle (D103) and the hundred-stage ultra-clean chamber (L103); and the nominal water capacity of the glue dissolving kettle (D101) is 420L-450L.
Description
technical field [0001] The invention relates to a compound synthesis device, in particular to a production device for an integrated circuit ultraviolet negative photoresist. Background technique [0002] UV negative photoresist is mainly used for photolithography of small and medium-sized integrated circuits, separation devices, semiconductor devices and other micro devices. Most of the existing production devices are relatively complicated. The ultraviolet negative photoresist is used as an integrated circuit photoresist. The quality of its production device has important economic significance for improving product quality and reducing by-product content. Contents of the invention [0003] The object of the present invention is to provide the production device of integrated circuit ultraviolet negative photoresist, mainly comprising: sol kettle (D101), cyclization kettle (D102), freezer (L101), glue mixing kettle (D103), filter ( L102), class 100 clean room (L103), where...
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