A low-velocity liquid flow control device and method for optical polishing slurry supply
A control method and slurry technology, which is applied in the direction of manufacturing tools, grinding/polishing equipment, metal processing equipment, etc., can solve the problems of non-ferromagnetism, achieve convenient low-speed supply, save costs, and improve utilization.
Active Publication Date: 2020-06-12
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
However, most of the abrasive particles used for optical surface polishing are not ferromagnetic, and abrasives often require high purity, and it is not suitable to add ferromagnetic auxiliary substances, which makes this technical solution difficult to apply to optical polishing in process
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[0030] In order to make the purpose, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0031] In the present invention, the abrasives and polishing liquids mentioned in the background art (that is, the mixture of abrasive particles and base liquid, which are divided into abrasives and polishing liquids according to their uses) are collectively referred to as polishing slurry, referred to as slurry for short.
[0032] Such as image 3 Shown is a schematic structural view of a low-speed liquid flow control device 100 according to an embodiment of the present invention, wherein the low-speed liquid flow control device 100 for optical polishing slurry supply includes: a ...
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The invention relates to a low-velocity liquid flow control method for optical polishing slurry supply. The device used includes: a liquid storage tank for storing slurry; a dip tube, the dip tube extends into the interior of the liquid storage tank, and the dip tube is connected with a three-way valve, and the three-way The valve is also connected with the air filter valve; the three-way valve is alternately directed to the dip tube and the air filter valve; the pump, one end of the pump is connected with the three-way valve, and the other end of the pump is connected with a pipeline, The pipeline is used to transport the slurry, and the pump is used to control the flow rate of the slurry; the nozzle is arranged at the other end of the pipeline. The device and method provided by the invention save costs, improve the utilization rate of slurry, and facilitate low-speed supply.
Description
technical field [0001] The invention relates to the technical field of supply devices for optical polishing slurry, in particular to a low-speed liquid flow control device for optical polishing slurry supply and a low-speed liquid flow control method for optical polishing slurry supply. Background technique [0002] During the grinding and polishing process of optical components, the pressure and relative speed generated by the grinding head are transmitted to the surface of the workpiece through the abrasive to achieve material removal. Abrasives are prepared in the form of suspension or solution, which are used in the grinding or polishing process, called abrasives or polishing fluids. The processing precision of chemical components is high, reaching the sub-micron level, so there is a very high requirement for the stability of the material removal rate. Among them, the change of the concentration of abrasive particles in the slurry directly affects the change of the mate...
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IPC IPC(8): B24B57/02
CPCB24B57/02
Inventor 胡海翔王旭张学军罗霄薛栋林
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI