Electron beam excitation fluorescence large-range direct detection imaging apparatus and a method thereof
An imaging device and electron beam technology, applied in measurement devices, photometry, photometry using electric radiation detectors, etc., can solve problems such as spectral signal distortion, reduced fluorescence intensity detection efficiency, and cumbersome system configuration
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[0031] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.
[0032] Such as figure 1 As shown, the electron beam excited fluorescence large-scale direct detection imaging device of this embodiment includes: a scanning electron microscope system, a scanning signal generator, a fluorescence collection and coupling system, a semiconductor photodetector, a scanning synchronous signal acquisition device, cooperative control and data processing Output system; wherein, the collaborative control and data processing output system is used as a synchronous control and data acquisition center, and is connected to the scanning electron microscope system, scanning signal generator, semiconductor photodetector and scanning synchronous signal collector; the scanning signal generator is also connected to The external scanning control interface of the electron beam to the scanning electron microscope system; the fluorescen...
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