A kind of LED chip with light guide thin film structure and manufacturing method

Abstract

The invention discloses an LED (light-emitting diode) chip with a photoconductive film structure and a manufacturing method of the LED chip with the photoconductive film structure. The manufacturing method includes: providing a substrate; forming an epitaxial layer structure on the substrate; forming a GaP layer on one side, opposite to the substrate, of the epitaxial layer structure; etching theGaP layer to form a flat-top inverted conical groove which does not penetrate the GaP layer, wherein an opening of the flat-top inverted conical groove is gradually increased in a first direction, andthe first direction is perpendicular to the substrate and points to the epitaxial layer structure from the substrate; sequentially depositing a first oxide layer, a second oxide layer and a third oxide layer on the surface of the flat-top inverted conical groove, wherein a refractive index of the first oxide layer is smaller than that of the second oxide layer, and a refractive index of the second oxide layer is smaller than that of the third oxide layer; arranging an electrode structure at the flat-top inverted conical groove. By the manufacturing method, light rays can be concentrated in the normal direction to achieve high direction uniformity of the light rays, the problem of total reflection between the GaP layer and air is solved, and accordingly light emitted by the LED chip is concentrated, and a light emitting angle is small.

Description

technical field [0001] The invention relates to the technical field of LED chip manufacturing, and more specifically, relates to an LED chip with a light-conducting film structure and a manufacturing method. Background technique [0002] With the continuous development of science and technology, various LED chips have been widely used in people's daily life, work and industry, bringing great convenience to people's life. [0003] Light Emitting Diode (LED) has many advantages such as high efficiency, low energy consumption, long life, no pollution, small size, rich colors, etc., and is widely used in lighting, display, backlight and other fields. [0004] However, at present, the traditional LED chip production is generally to manufacture the front and back electrodes after the epitaxial layer structure is prepared. The front and back electrodes will absorb the light emitted by the LED chip, resulting in a reduction in the light output of the LED chip, and the LED chip has a...

AI Technical Summary

Problems solved by technology

[0004] However, the current traditional LED chip production is generally to make the front and back electrodes after the epitaxial layer structure is prepared. The front and back electrodes will absorb the light emitted by the LED chip, resulting in a reduction in the amount of light emitted by the LED chip, and the LED chip has a large luminous angle.

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