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Micro actuator

A technology of micro-actuator and driving mechanism, applied in the field of micro-electromechanical, can solve problems such as inability to meet precision control, and achieve the effect of meeting the needs of precise control

Inactive Publication Date: 2018-07-24
NANJING POLYTECHNIC INSITUTE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional drives (displacement drives) include hydraulic cylinder servo (or stepper) motors and voice coil motors, which can produce displacements from millimeters to centimeters but cannot meet the precision control of microns or smaller ranges. With the rapid development of microelectronics technology, Fabrication of micro-scale micro-devices has become a reality, but a micro-driver with precise control of step accuracy is still needed to realize the control of the micro-driver

Method used

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no. 1 example

[0029] Please refer to figure 2 , Figure 4 , in an embodiment of the present invention, a micro-driver is provided, a driving principle is provided, and its driving action process is described.

[0030] The micro-driver includes: a driving mechanism 1 , a conducting mechanism 2 and a driven mechanism 3 .

[0031] The driving mechanism 1 includes: a telescopic member 10 made of electrically strained material, a propulsion assembly 11, and a control circuit 12, specifically, the telescopic member 10 is piezoelectric ceramics, and the propulsion assembly 11 includes: a limit rod 110 and a push piece 111 , the control circuit 12 includes: a constant current power supply 120 , an inductive switch 121 and an inductor 122 . One end of the piezoelectric ceramic is fixed, and the other end of the piezoelectric ceramic is fixed with a limit rod 110 , the center of the limit rod 110 is fixed on the other end of the piezoelectric ceramic, and the push piece 111 is installed at both en...

no. 2 example

[0039] Please refer to image 3 , Figure 4 In an embodiment of the present invention, a micro-driver using another driving principle is provided, and its driving action process is described.

[0040] The micro-driver includes: a driving mechanism 1 , a conducting mechanism 2 and a driven mechanism 3 .

[0041] The drive mechanism includes: a telescopic member 10 made of electrically strained material, a propulsion assembly 11, and a control circuit 12, specifically, the telescopic member 10 is piezoelectric ceramics, and the propulsion assembly 11 includes: a limit rod 110 and a push piece 111, The control circuit 12 includes: a constant current power supply 120 , an inductive switch 121 and an inductor 122 . One end of the piezoelectric ceramic is fixed, and the other end of the piezoelectric ceramic is fixed with a limit rod 110, the center of the limit rod 110 is fixed on the other end of the piezoelectric ceramic, and the push piece 111 is installed at both ends of the ...

no. 3 example

[0048] The wheel belt provided by the present invention uses 36 tooth grooves.

[0049] Please refer to figure 2 , Figure 4 and Figure 6 , Figure 6 In order to use the wheeled micro-robot driven by the micro-driver provided by the present invention, the power is output by inserting the rotating shaft 40 and the rotating wheel 41 in the power output hole 30 at the center of the tire belt. The radius of the rotating wheel 41 is r, and the radius of the rotating wheel 41 is r. The circumference is 2πr (μm). If the action scale of the piezoelectric ceramic is 5 μm, it means that the piezoelectric ceramic pushes the wheel belt to travel a distance of 1 slot width each time, which means that the wheel belt drives the driven wheel to rotate 1 / 36×360 °=10° angle, because the rotating wheel 41 is coaxial with the driven wheel, then the rotating wheel 41 also rotates at the same angle, which means that the rotating distance of the rotating wheel 41 is 10 / 360×2πr=πr / 18 (μm), then ...

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Abstract

The invention provides a micro actuator, which comprises a driving mechanism capable of telescoping in a fixed direction, a conduction mechanism cooperated with the driving mechanism and a driven mechanism in drive cooperation with the conduction mechanism. When the driving mechanism extends in a first direction, the conduction mechanism is driven to move in the first direction, and then, the driven mechanism is driven to act. The driving mechanism comprises a telescopic member formed by an electric strain material, a pushing assembly and a control circuit. The control circuit is used for controlling the telescopic member to stretch out and draw back periodically to enable the telescopic member to drive the pushing assembly to move in the first direction or move in a second direction opposite to the first direction; and movement of the pushing assembly in the first direction drives the conduction mechanism to move in the first direction. The electric strain material adopted by the micro actuator can realize micron-level precision of electric strain telescoping; and by controlling periodic telescoping frequency of the telescopic member, micron-level precision driving mobile controlcan be realized.

Description

technical field [0001] The invention relates to the field of micro-electromechanical devices, in particular to a micro-driver. Background technique [0002] Micro-drive or micro-actuator is an important actuator, its main function is to realize the output of force (including torque) or displacement (including linear displacement and angular displacement), and it is an important part of micro-electromechanical system. [0003] Traditional drives (displacement drives) include hydraulic cylinder servo (or stepper) motors and voice coil motors, which can produce displacements from millimeters to centimeters but cannot meet the precision control of microns or smaller ranges. With the rapid development of microelectronics technology, The preparation of micro-scale micro-devices has become a reality, but a micro-driver with precise control of step accuracy is still needed to realize the control of the micro-driver. Contents of the invention [0004] The purpose of the present in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/06
CPCH02N2/02H02N2/06
Inventor 虞启凯杨红鑫徐永军
Owner NANJING POLYTECHNIC INSITUTE
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