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Automatic optical detection equipment

An automatic optical inspection and optical inspection technology, applied in the direction of optical testing flaws/defects, etc., can solve the problem that the detection method has not been effectively developed, the detection accuracy is not high, and it is difficult to detect metal mask and solar screen defects. requirements, etc.

Inactive Publication Date: 2018-08-07
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, the detection accuracy of the detection equipment used to detect the defects of the opening of the stencil on the market is mostly not high, and it is difficult to meet the requirements of detecting the defects of the metal mask and the solar screen, and the detection method has not been effectively developed.

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  • Automatic optical detection equipment
  • Automatic optical detection equipment

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Embodiment Construction

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0026] In describing the present invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "horizontal", " The orientation or positional relationship indicated by "vertical", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, so as to Spe...

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Abstract

The invention provides automatic optical detection equipment. The automatic optical detection equipment has the advantages that a detection workpiece platform can be driven by a double-drive movementY-axis to move in Y-direction, a camera assembly can be driven by a single-drive movement X-axis to move in X-direction and preferably can be driven by ball screw mechanisms to move in Z-direction, and spatial three-dimensional movement can be completed by resultant movement of the X-axis, the Y-axis and a Z-axis; the automatic optical detection equipment is mainly used for detecting sheets such as metal masks and solar screen meshes with tiny defects on the surfaces, and gaps on markets can be filled.

Description

technical field [0001] The invention belongs to the field of semiconductors, and in particular relates to an automatic optical detection device for a screen board. Background technique [0002] In the process of making metal mask and solar screen, there will be many tiny openings on the metal mask and solar screen, and the influence of manufacturing process and environment will cause defective openings in the manufacturing process, such The opening is a repairable defect. If the defect can be detected by the inspection equipment and repaired, the yield rate of the product can be improved. [0003] At present, the detection accuracy of the detection equipment used to detect the defects of the opening of the stencil is mostly not high, and it is difficult to meet the requirements of detecting the defects of the metal mask and the solar screen, and the detection method has not been effectively developed. Contents of the invention [0004] Based on the above, the present inve...

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Application Information

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IPC IPC(8): G01N21/88
CPCG01N21/88
Inventor 魏志凌王武怀孙杰
Owner KUN SHAN POWER STENCIL