A kind of air bearing guide device with non-equal depth throttling cavity

Abstract

The invention discloses an air-floating support and guide device with non-equal-depth throttle chambers; by regularly arranging throttle plugs on the air-floating working surface, an array of non-equal-depth throttle chambers is formed to ensure the air-floating guide rail Under the premise of bearing and stability, the rotation stiffness per unit area of ​​the air-floating working surface can be improved. The invention can establish a floating support guide device with small volume, long cantilever and large torque load.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and machinery, and in particular relates to an air bearing guide device with a non-equal depth throttling chamber. Background technique [0002] In recent years, as the advanced chip manufacturing industry gradually develops towards functional integration and volume miniaturization, the gas static pressure linear motion benchmark has become one of the key components in cutting-edge lithography machines due to its remarkable advantages such as high speed and high precision; The high-speed, high-acceleration, and high-motion-precision requirements of the diaphragm in the exposure system of the engraving machine put forward the requirements for high load-carrying capacity and high rotational stiffness of the gas-static guide rail in the gas-static linear motion benchmark; in order to avoid the linear motion mechanism from blocking Optical path or touch optical device, the diaphragm plat...

AI Technical Summary

Problems solved by technology

The linear motion reference in its exposure system adopts a mechanical guide rail structure and reaches 40m / s 2 Acceleration movement of (Y.B.Patrick Kwan, Erik L.Loopstra. Nullifying Acceleration Forces in Nano-Positioning Stages for Sub-0.1mm Lithography Tool for 300mm Wafers[J].proceeding of SPIC: Optical Microlithography, 2010,4346:544-557) ; But with the development of the chip manufacturing industry, traditional sliding / rolling guideways are difficult to meet the requirements of high acceleration motion and working temperature stability

[0004] Patent CN201220540610 "Multilayer Air Float Suspension Device for Two-Dimensional Frictionless Long-distance Movement" proposes an air flotation-guided suspension movement device, which mainly includes a single-layer suspension device and an unfolding test frame, and the single-layer suspension device Including supporting parts, air bearing moving parts, detection parts and guide rail system, air bearing moving parts include longitudinal air bearing sleeves, two horizontal air bearing sleeves, two air bearing seats, telescopic air pipes, horizontal air bearing shafts and hanging Tooling; this device can realize large displacement and long-distance follow-up movement, and satisfy the cooperative movement between multi-layer hanging devices; but the inventive device is a follow-up movement device, which cannot guarantee the movement accuracy, and needs to be installed on the unfolding test frame used on the Internet, the structure is not compact enough

[0005] Patent CN201310436356 "Air Suspension Type Three-Dimensional Unfolding Experimental Device" proposes a three-dimensional motion device with high positioning accuracy and fast response speed, which mainly includes more than a dozen air floating motion mechanisms correspondingly distributed in space, and with the help of pulleys, slings, counterweights, etc. The mechanism is installed inside the support frame; however, although the device can meet a certain motion accuracy, due to many motion links, it cannot ensure fast and accurate displacement response at the output end under high-frequency motion state, and the structure is not compact enough

[0006] Patent CN201410839808 "A double-air-floating rail-type grating scoring tool holder driving device" proposes a small one-dimensional motion device, which mainly includes two sets of air-floating rails installed in parallel, and is improved by fixing the air-floating sliding sleeve. The movement stability of the marking tool holder; the device can realize high-speed and high-frequency movement, but compared with the displacement output end of the device, such as the tool holder adapter plate and the marking tool holder, the air bearing guide rail is too large, so the unit Less rotational stiffness in area and requires toolholder counterweights for balance

[0007] Patent CN201610130635 "Double-sided air flotation transport platform" and patent CN201710832517 "A motion platform based on H-shaped air flotation guide rails" respectively propose air flotation devices to realize two-dimensional motion, which can achieve high motion while taking into account stability and positioning accuracy, but the use methods of the two devices are mounted, and cannot be used for suspension or cantilever sports occasions, and for the exposure system of the lithography machine, the volume is too large

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