The application provides a backside incidence and top reflection integrated
fiber-
waveguide coupler, which comprises a substrate, an
SOI substrate, a linearly variable
grating device, a reflection cavity structure, a lens focusing
fiber and a
fiber fixing
assembly, wherein the
SOI substrate is arranged on the top surface of the substrate, the linearly variable
grating device is arranged on the
SOI substrate, the reflection cavity structure is arranged above the
grating waveguide in the linearly variable grating device and is used for reflecting the uncoupled light back to the grating area to enhance the
coupling efficiency, and the lens focusing fiber and the fiber fixing
assembly are arranged on the back surface of the substrate, so that the incident
light signal enters the grating
waveguide part of the grating area through the back surface of the substrate at a preset inclination angle. The fiber-waveguide coupler of the application can improve the
coupling efficiency, widen the
coupling bandwidth, release the front surface space of the
chip, and is beneficial to high-density
photon integration and low-temperature environment application.