The invention relates to a
coplanar waveguide-based high-temperature superconducting
quantum voltage standard device and a preparation method thereof. The
coplanar waveguide-based high-temperature superconducting
quantum voltage standard device comprises a substrate, a
coplanar waveguide and a high-temperature superconducting Josephson junction array, the coplanar
waveguide comprises a first grounding strip, a second grounding strip and a target center
signal strip which is located between the first grounding strip and the second grounding strip and serves as a
microwave transmission structure to receive
microwave signals; the high-temperature superconductive Josephson junction array comprises N Josephson junctions connected in series with a target center
signal band, and is formed by patterning an initial center
signal band in a preset area through a focused
helium ion beam technology or by adopting a technology of shuttling a bicrystal
grain boundary back and forth by a winding line, the residual initial center
signal band outside the area is used for forming the target center
signal band. Aiming at the problems existing in a high-temperature superconducting
quantum voltage standard device of a three-dimensional
resonant cavity, a novel device with a compact structure and high stability is provided, efficient and
broadband excitation is realized, and meanwhile, the preparation method is low in difficulty, high in
repeatability and suitable for
batch production.