The invention discloses a balanced
broadband band-pass filter with a stacked structure. The balanced
broadband band-pass filter comprises a first layer
wafer and a second layer
wafer which are vertically stacked, a
coplanar waveguide structure is adopted in the lower layer RDL of the first layer of
wafer to realize differential input and output ports and two sections of
coplanar waveguide transmission lines; a
coplanar waveguide structure is adopted in the upper-layer RDL of the second-layer wafer to realize a differential input / output port and two sections of coplanar
waveguide transmission lines, and the coplanar
waveguide structure and the coplanar
waveguide structure of the first-layer wafer form a differential pair; a coplanar waveguide structure is adopted in the upper-layer RDL of the first-layer wafer or the lower-layer RDL of the second-layer wafer to realize two sections of open-circuit stubs; a coaxial TSV structure and a single-hole
copper cylinder TSV are integrated in the first layer wafer and the second layer wafer, and the coaxial TSV structure is used for realizing a vertical TSV
transmission line and is coupled with the coplanar waveguide
transmission line to form a
resonant cavity; the single-hole
copper cylinder TSV provides grounding reference for the coplanar waveguide structure and the coaxial TSV structure. According to the invention, a high-performance filtering function can be realized in a limited space.