Power supply
system (2) with a power converter (3) generating a high-frequency power
signal, which can be connected to a load (6) to supply a
plasma or
gas laser process with power, wherein the power converter (3) comprises at least one
amplifier stage (40) with a first and a second
amplifier path (42, 43) each having an
amplifier unit (42a, 43a), wherein the first amplifier path (42) is configured to output a first amplifier path output
signal and the second amplifier path (43) is configured to output a second amplifier path output
signal having a
phase shifted relative to the first amplifier path output signal, which is unequal to, in particular greater than, 0° and unequal to, in particular less than, 180°, wherein the amplifier paths (42, 43) are connected to a phase-shifting coupler unit (47) which couples the output signals of the amplifier paths (42, 43) to a high-frequency power signal, characterized in that the first and second amplifier units (42a, 43a) are designed as Doherty amplifiers, each having the following components: i. a base load amplifier (103) configured to provide base load amplifier power; ii. a
peak load amplifier (104) configured to provide
peak load amplifier power; and iii. a power coupler (107) for combining the base load amplifier power and the
peak load amplifier power at the output of the respective first and second amplifier units (42a, 43a) to form an amplifier output power (P out ).