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Method and device for detecting surface shape of planar component through adopting slope splicing

A technology for detecting plane and slope, which can be used in measurement devices, optical devices, graphics and image conversion, etc., and can solve problems such as incomplete correction of slope errors.

Inactive Publication Date: 2018-10-02
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If only the traditional stitching model is applied to the multi-camera PMD system, the slope error caused by calibration and adjustment between different cameras cannot be completely corrected during stitching.

Method used

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  • Method and device for detecting surface shape of planar component through adopting slope splicing
  • Method and device for detecting surface shape of planar component through adopting slope splicing
  • Method and device for detecting surface shape of planar component through adopting slope splicing

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Embodiment Construction

[0024] In order to make the purpose and solution of the present invention more clear, the implementation manner of the present invention will be further described below in conjunction with the accompanying drawings. It is necessary to point out that the following examples are only used for further description of the present invention, and cannot be interpreted as limiting the protection scope of the present invention, and those skilled in the art make some non-essential improvements to the present invention according to the above-mentioned content of the present invention And adjustments still belong to the protection scope of the present invention.

[0025] Please refer to figure 1 , the embodiment of the present invention provides a method and device for detecting the surface shape of a planar element by slope splicing. Its basic components include No. 1 pinhole camera 1, No. 2 pinhole camera 2, display 3 and DUT 4. It should be noted that the number of pinhole cameras is ...

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Abstract

The present invention provides a method for detecting the surface shape of a planar component through adopting slope splicing. When the method is used for detecting the planar component, involved basic components include pinhole cameras, a display, and a component under test. In a case where the measurement area of one pinhole camera cannot cover the entire component under test, in order to avoidmoving a measurement device or the component under test during measurement, save measurement time and realize high-precision measurement, a plurality of pinhole cameras can be used to simultaneously measure different areas of the component under test, wherein adjacent areas have overlapping regions; after slope data measured by the pinhole cameras are obtained, a slope splicing method provided bythe present invention can be used to completely correct slope error in the overlapping regions which is caused by the difference of the calibration and adjustment of different cameras; and the complete slope of the component under the test can be obtained. The method and device of the invention have the advantages of high measurement precision and high measurement speed. With the method and deviceof the invention adopted, measurement can be completed at one time, and a working distance can be decreased.

Description

Technical field: [0001] The invention relates to a method and device for detecting the surface shape of a planar element by slope splicing, in particular to a scheme for simultaneously detecting large-diameter planar optical elements with multiple cameras based on phase measurement deflection. Background technique: [0002] In terms of optical detection, it has always been a difficult point to perform high-precision detection of planar optical components, especially large-diameter planar optical components. The traditional detection method is to use interferometer detection, but interferometer detection requires a reference mirror whose size is at least equivalent to the size of the measured component, and the surface quality of the reference mirror must be better than that of the measured mirror. Such a reference mirror is difficult to manufacture . Another way to detect large-aperture planar components is to use a small-aperture interferometer to measure several times to ...

Claims

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Application Information

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IPC IPC(8): G01B11/24G06T3/40
Inventor 李大海陈鹏宇王瑞阳郭广饶鄂可伟刘鑫
Owner SICHUAN UNIV
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