Optical angle measurement method
An angle measurement and optical technology, applied in the field of optical measurement, can solve problems such as high cost, difficulty in mass application, surface contamination and damage of components to be measured, and achieve high precision, wide application range and good operability
Active Publication Date: 2020-01-31
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
[0002] In the traditional technology, the instruments for measuring the angle between the optical mirror surface of the optical element mainly include a rotary table, a three-coordinate measuring instrument, a laser tracker, an autocollimator, and an interferometer. Due to the limitation of the field range, it is usually only suitable for small-angle measurement. Although the rotary table, three-coordinate measuring instrument, laser tracker, etc. The tracker is a contact measurement, which is easy to cause pollution and damage to the surface of the component to be tested
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Embodiment 2
[0046] The main difference between the operation steps of Embodiment 2 and Embodiment 1 is that after the second step is completed, the autocollimator 3 needs to be moved to the side where the second mirror 2 is located, so that it can be treated at the same time as in Step 2. The measuring surface B41 and the second mirror 2 are collimated to ensure that the second reflecting mirror 2 is in a parallel posture to the surface to be measured B41, because the outgoing light of the autocollimator 3 is not affected by the refraction of the component to be measured 4, so even if the After the component under test 4 is removed, the autocollimator 3 and the second reflector 2 are still in a collimated state, that is, the step 4 of the first embodiment can be omitted, and the step 5 is directly performed to start rotating the second reflector 2 to measure, the operation steps are the same as the follow-up in the first embodiment, and the angle between the two surfaces of the light-tight...
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The present invention discloses an optical angle measurement method. The method comprises the following steps of: the step 1, placing an element to be measured; the step 2, transiting a surface normalof the surface to be measured to a first reflection mirror; the step 3, transiting the surface normal of the surface to be measured onto a second reflection mirror; the step 4, performing collimationof the second reflection mirror; the step 5, rotating the second reflection mirror, and measuring the rotation angle through an autocollimation; the step 6, performing collimation of the second reflection mirror; and the step 7, repeating the operations in the step 5 and the step 6 for many times, measuring the rotation angle of the second reflection mirror in order until the reflection of cross-hair, reflected by reflection surfaces of the first reflection mirror and the second reflection mirror, of the autocollimation are stopped when appear in the view field of the autocollimation, and finally calculating the inclined angle of the two surfaces to be measured. The method employs the differential though to allow the employing of the autocollimation to measure the extra view field large angle to become possible and performs non-contact measurement so as not to cause damaging and pollution of surfaces of the elements, and therefore, the reliability safety is good, and the precision ishigh.
Description
technical field [0001] The invention belongs to the field of optical measurement, in particular to an optical angle measurement method. Background technique [0002] In the traditional technology, the instruments for measuring the angle between the optical mirror surface of the optical element mainly include a rotary table, a three-coordinate measuring instrument, a laser tracker, an autocollimator, and an interferometer. Due to the limitation of the field range, it is usually only suitable for small-angle measurement. Although the rotary table, three-coordinate measuring instrument, laser tracker, etc. The tracker is a contact measurement, which is easy to cause pollution and damage to the surface of the component to be tested. This paper introduces a low-cost, high-precision, safe and clean large-angle measurement method beyond the field of view of the instrument. Contents of the invention [0003] In order to solve the above technical problems, the present invention p...
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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 叶朗独伟锋徐旭李珂魏春蓉贺群李奇
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS