Device for performing micro-region magneto-optical spectroscopic ellipsometry analysis on film samples and application of device

A technology of spectroscopic ellipsometry and samples, which is applied in the field of magneto-optical ellipsometry, can solve the problems of cumbersome operation, limited wavelength selection range, affecting measurement accuracy and speed, etc., and achieve the effect of improving resolution

Inactive Publication Date: 2018-11-13
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this device can only perform magneto-optical ellipsometric analysis on the average magnetic parameters within the 3mm spot range in one measurement, and cannot perform micro-area magneto-optical ellipsometric analysis; and the adjustable wavelength laser used in this device can only choose 410nm, 450nm, 520nm, 638nm, 660nm, 780nm, 808nm, 830nm eight discrete wavelengths, the wavelength selection range is limited; in addition, the device requires cumbersome operations of manually rotating the polarizer and analyzer, which affects the measurement accuracy and speed

Method used

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  • Device for performing micro-region magneto-optical spectroscopic ellipsometry analysis on film samples and application of device
  • Device for performing micro-region magneto-optical spectroscopic ellipsometry analysis on film samples and application of device
  • Device for performing micro-region magneto-optical spectroscopic ellipsometry analysis on film samples and application of device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Such as Figure 1-2 shown.

[0053] A device for micro-area magneto-optical ellipsometry analysis of thin film samples, including a computer, an electromagnet, a xenon lamp light source, a monochromator, a fiber coupler, an output fiber, a collimating mirror, and a polarizer arranged in sequence according to the direction of the optical path , sample stage, microscope objective lens, lens tube lens, analyzer and CCD; the sample stage is arranged at the center of the two magnetic poles of the electromagnet; the electromagnet is connected with the computer through the magnet control system; the polarizer and the detector The polarizer is respectively connected with the rotating shaft of the motor; the motor is connected with the computer through the motor control module; the monochromator is connected with the computer;

[0054] The xenon light source, monochromator, fiber coupler and output fiber form a light source module; the collimator and polarizer form a polarizati...

Embodiment 2

[0060] The device for micro-area magneto-optical ellipsometry analysis of thin film samples as described in Example 1, further, the collimator and polarizer are arranged on the same optical axis as the incident light; the imaging unit and analyzer Set on the same optical axis as the reflected light from the sample.

Embodiment 3

[0062] As described in Example 1, the device for micro-area magneto-optical ellipsometry analysis of thin film samples, further, the sample stage includes a two-dimensional translation stage for adjusting the XY axis, a one-dimensional translation stage for adjusting the Z axis, and an adjustment pitch αβ-axis tilting platform; the sample stage can be adjusted in height and pitch by adjusting the knob. The two-dimensional translation platform is produced by Beijing Maofeng Optoelectronics Technology Co., Ltd., the model is MPV60-2S; the one-dimensional translation platform is produced by Beijing Maofeng Optoelectronics Technology Co., Ltd., the model is MPV60-1S; the αβ axis tilting platform Produced by Sigma Koki Co., Ltd., the model is AIS-60B;

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Abstract

The invention relates to a device for performing micro-region magneto-optical spectroscopic ellipsometry analysis on film samples and application of the device. The device provided by the invention comprises a light source module, a polarizing module, a sample table, a magnetic field module, a polarization detecting module, a detecting and analyzing module and a motor control module. Spectroscopicmagneto-optical ellipsometry analysis is performed by a combination of a xenon lamp light source and a monochromator, wherein the spectroscopic measurement range is 300 nm to 800 nm, the accuracy is0.2 nm, and the repeatability is 0.1 nm; a collimating mirror, an imaging unit and a CCD are used to receive light intensity information of each micro-region of the samples in the whole light spot range, wherein the diameter of the light spot is 3 mm, the diameter of the resolvable smallest micro-region is 2 mum, each pixel of the CCD corresponds to different micro-regions of the samples, and themagneto-optical ellipsometry analysis of all micro-regions in a range of the light spots on surfaces of the samples is realized by analyzing the light intensity information of each pixel of the CCD.

Description

technical field [0001] The invention relates to a device for performing micro-region magneto-optical ellipsometric analysis on thin film samples and its application, belonging to the technical field of magneto-optical ellipsometric analysis. Background technique [0002] The magneto-optical properties of magnetic materials are widely used in magneto-optical storage. Magneto-optical ellipsometry is a generalized ellipsometry technique that uses the magneto-optical Kerr effect of magnetic materials for ellipsometry. [0003] The microstructure of the material and its atomic arrangement determine the performance of the material. At this stage, the design of materials is mainly dependent on experiments, the design cycle is long, and the success rate is low. The purpose of the Materials Genome Project is to find and establish materials from the atomic arrangement In turn, the formation of phases, the formation of microstructures, the relationship between macroscopic properties an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/21
CPCG01N21/211G01N2021/213
Inventor 连洁宋浩男戴凯石玉君姜清芬
Owner SHANDONG UNIV
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