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Flat plate impurity quick detecting device and flat plate impurity detecting method

A technology of impurities and flat plates, which is applied in the direction of measuring devices, optical testing of defects/defects, and material analysis through optical means, can solve the problems of slow calculation speed and difficulty in determining the size of dust, etc., and achieve fast and accurate detection and detection process Convenience and quickness, the effect of improving detection efficiency and detection accuracy

Inactive Publication Date: 2018-11-13
CHINA HEFEI TAIHE OPTOELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, in the actual production process, the calculation speed is slow with the above method, and it is difficult to determine the size of the dust, but only the amount of dust can be known

Method used

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  • Flat plate impurity quick detecting device and flat plate impurity detecting method
  • Flat plate impurity quick detecting device and flat plate impurity detecting method
  • Flat plate impurity quick detecting device and flat plate impurity detecting method

Examples

Experimental program
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no. 1 example

[0050] see figure 1 , this embodiment provides a flat plate impurity quick detection device 100, which is used to detect substrates to be tested, such as glass substrates or silicon wafers, which require high cleanliness and cleanliness, and can quickly and accurately detect It is very convenient to measure the position and size of impurities such as dust on the substrate.

[0051] The flat-panel impurity quick detection device 100 includes a substrate carrier 110, an optical probe 130, a parallel light generator 150, an interference light-transmitting plate 170, and a processor 190. The substrate carrier 110 is used to carry the substrate to be tested. The parallel light generator 150 is disposed above the substrate carrying platform 110 for generating parallel light and irradiating the parallel light to the substrate to be tested. The interference light-transmitting plate 170 is disposed between the substrate supporting platform 110 and the parallel light generator 150 and ...

no. 2 example

[0064] see Figure 4 , this embodiment provides a method for detecting flat impurities, which is detected by the flat impurity quick detection device 100 described in the first embodiment, wherein the basic structure and principle of the flat flat impurity quick detection device 100 described in this embodiment and The resulting technical effect is the same as that of the first embodiment. For brief description, for parts not mentioned in this embodiment, reference may be made to the corresponding content in the first embodiment.

[0065] The flat-panel impurity quick inspection device 100 includes a substrate carrier 110, an optical probe 130, a parallel light generator 150, an interference light-transmitting plate 170, and a processor 190. It is arranged above the interference transparent plate 170 , the parallel light generator 150 is arranged above the substrate carrier 110 and the interference transparent plate 170 , and the processor 190 is electrically connected to the ...

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PUM

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Abstract

The invention provides a flat plate impurity quick detecting device and a flat plate impurity detecting method, and relates to the field of flat plate detection. The flat plate impurity quick detecting device comprises a substrate carrier, an optical probe, a parallel light generator, an interference light transmitting plate and a processor. The parallel light generator is disposed above the substrate carrier and used for generating parallel light and illuminating the parallel light to a substrate to be detected. The interference light transmitting plate is disposed between the substrate carrier and the parallel light generator and capable of being arranged with an included angle formed between the plate and the substrate to be detected. The optical probe is disposed above the interferencelight transmitting plate and electrically connected to the processor for collecting image information of interference fringes and transmitting the information to the processor. The processor is usedfor generating impurity position data and impurity area data according to the image information. Compared with the prior art, the flat plate impurity quick checking device is capable of quickly and accurately detecting dust and determining the size of the dust and convenient and quick to detect, and greatly improves the detecting efficiency and the detecting accuracy.

Description

technical field [0001] The invention relates to the field of plate detection, in particular to a plate impurity quick detection device and a plate impurity detection method. Background technique [0002] In the flat panel display industry, the existing dust detection scheme is to use a camera to take pictures of the glass substrate, by detecting the gray value of each position on the glass substrate, and comparing the size of the gray value with a given threshold, if the threshold is exceeded, it is judged Here the pixels are covered with dust, otherwise it is normal. [0003] However, in the actual production process, the calculation speed using the above method is relatively slow, and it is difficult to determine the size of the dust, but only the quantity of the dust can be known. [0004] In view of this, it is particularly important to design and manufacture a flat-panel impurity quick inspection device that can quickly and accurately detect dust and determine the size...

Claims

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Application Information

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IPC IPC(8): G01N21/94G01N21/01
CPCG01N21/94G01N21/01
Inventor 桑浩颜天信唐麟汪洪波
Owner CHINA HEFEI TAIHE OPTOELECTRONICS TECH