Purification method and device for boron trichloride

A boron trichloride and purification method technology, applied in the direction of boron halide compounds, boron halides, etc., can solve the problems of high energy consumption and difficult purification, and achieve the effects of low energy consumption, improved purification effect, and reduced energy consumption

Pending Publication Date: 2018-11-16
欧中电子材料(重庆)有限公司
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Problems solved by technology

[0006] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a method for purifying boron trich...

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  • Purification method and device for boron trichloride

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Embodiment

[0018] A kind of purification method of boron trichloride, provides flowing power for the purification of boron trichloride solution by differential pressure, and its concrete method comprises the following steps:

[0019] S1 Decomposition Section: The raw material tank is pressurized to 5.5-6.5 bar with an inert gas, and then the crude boron trichloride liquid phase is extruded to the carbonyl chloride decomposer. Acyl chloride impurities are catalyzed by ultraviolet light to decompose (COCl 2 →CO↑+Cl 2 ↑), the reaction pressure in the carbonyl chloride decomposer is 4.5-5.5bar, and the reaction temperature is 30-40°C; while the impurities are being decomposed, the inert gas passes through the evenly distributed inert gas blowback holes at the bottom of the phosgene The carbon monoxide and chlorine gas produced by phosgene are backflushed to remove these impurities from the boron trichloride liquid and discharged from the top of the phosgene decomposer. The backflush pressur...

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Abstract

The invention discloses a purification method for boron trichloride, which includes the steps of: S1) decomposition section: feeding a liquid-phase boron trichloride crude product into a carbonyl chloride decomposer, wherein carbonyl chloride impurities in the boron trichloride are subjected to photo-decomposition under ultraviolet irradiation catalysis in the decomposer, pressure in the decomposer being 4.5-5.5 bar and reaction temperature being 30-40 DEG C, in addition, back-blowing is carried out at the bottom of the decomposer with inert gas with pressure being 5.5-6.5 bar; S2) rectification section: after the treatment in the S1), the boron trichloride is compressed into a two-stage rectification section under effect of pressure difference from the bottom of the carbonyl chloride decomposer to successively remove the heavy components and the light components from the boron trichloride crude product to obtain a boron trichloride product, wherein in the first rectification stage, operation pressure is 3-3.5 bar and operation temperature is 43-53 DEG C, and in the second rectification stage, operation pressure is 2.6-3.1 bar and operation temperature is 6-50 DEG C. Compared withthe prior art, the method can increase the purity of purified boron trichloride and reduce energy consumption.

Description

technical field [0001] The invention relates to the technical field of chemical separation, in particular to a boron trichloride purification method and device. Background technique [0002] Boron trichloride, chemical formula BCl 3 , is a colorless gas or liquid with an odor. Boron trichloride is currently used as a raw material for organic synthesis catalysts and boron and its compounds, and is also widely used as a dopant or etchant in the semiconductor integrated circuit manufacturing industry. With the rapid development of the semiconductor industry, the fineness of integrated circuits is getting higher and higher. Therefore, boron trichloride, as a raw and auxiliary material used in the manufacturing process of integrated circuits, has higher and higher purity requirements. [0003] In the preparation process of boron trichloride, not only the impurities in boron oxide or boron as raw material will be chlorinated into chlorides, even the material of the reactor will ...

Claims

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Application Information

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IPC IPC(8): C01B35/06
CPCC01B35/061
Inventor 雷海平李相勳张建长吕其明吴海峰
Owner 欧中电子材料(重庆)有限公司
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