Suction cup assembly mechanism and unloading method for unloading groups of silicon wafers in graphite boat carrier

Abstract

The invention discloses a sucking disc assembly mechanism and unloading method for unloading groups of silicon wafers in a graphite boat carrier so that a problem that groups of silicon wafers in a graphite boat are easy to break when being captured by a vacuum adsorption assembly can be solved. A vacuum sucking disc assembly is arranged right above a graphite boat carrier (1); adsorption plates (6) extending downwardly are arranged on a base (5) of the vacuum sucking disc assembly at equal intervals; and stepped cylindrical vacuum sucking discs (9) are embedded into air tube slots (7) and arecommunicated with a vacuum generator through air tubes (8) in the air tube slots. The right sides of the stepped cylindrical vacuum sucking discs (9) are arranged at the outer sides of the right sides of the adsorption plates (6) into which the stepped cylindrical vacuum sucking discs (9) are embedded; and chamfered inclined surfaces (12) are formed in the lower ends of the right sides of the stepped cylindrical vacuum sucking discs (9). The sucking disc assembly mechanism having a simple structure is used convenient and practically; and a phenomenon of crushing the silicon wafers by the sucking disc is avoided.

Description

technical field [0001] The invention relates to a vacuum chuck assembly, in particular to a mechanism for unloading the vacuum chuck assembly for groups of silicon wafers in the graphite boat after the graphite boat that has completed the high-temperature sintering process exits the sintering furnace. Background technique [0002] In the production process of silicon wafers, after the silicon wafers have completed the texturing, etching and diffusion processes, they are placed in a multi-layer special basket and wait to be grabbed. The robot controls the vacuum adsorption component and waits to be grabbed in the special basket. A group of silicon wafers are picked up by contact adsorption and transferred to the graphite boat carrier. The existing vacuum suction assembly is composed of a cuboid base and an adsorption plate, and the adsorption plates are arranged parallel to each other at equal intervals on the rectangular base. The entire vacuum suction cup assembly is comb-s...

AI Technical Summary

Problems solved by technology

[0003] The invention provides a vacuum suction cup assembly mechanism for unloading groups of silicon wafers in a graphite boat carrier, which solves the problem that the cylinder side of the vacuum suction cups will easily collide when the vacuum adsorption assembly grabs the groups of silicon wafers in the graphite boat. The warped silicon wafer rubs against each other, causing the silicon wafer to break

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