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A lithographic machine small workpiece clamp

A technology for small workpieces and lithography machines, which is applied in the field of lithography machine fixtures. It can solve the problems of workpiece movement, chip fine processing and fixing difficulties, and affect the accuracy of small workpieces, so as to achieve flexible and convenient use, overcome inability to process or inconvenient processing , a wide range of practical effects

Active Publication Date: 2018-12-21
CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Problems solved by technology

[0002] At present, many laboratory lithography machines do not have more practical lithography machine fixtures, so it is difficult to fix small workpieces such as chips for fine processing; at the same time, small workpiece processing requires precise rotation and quick reset. Processing, when there is no special fixture for precise positioning of small workpieces, it is easy to cause movement of the workpiece during processing, thus affecting the precision of fine machining of small workpieces

Method used

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  • A lithographic machine small workpiece clamp
  • A lithographic machine small workpiece clamp
  • A lithographic machine small workpiece clamp

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Embodiment Construction

[0026] refer to Figure 1 to Figure 12 The shape structure of the lithography machine is a small workpiece fixture, which is composed of three parts: a lifting and rotating function device, a light spot positioning function device, and a fixing function device. It is characterized in that: the overall structure of the jig, from bottom to top, is the bottom base platform 1, the outer hollow column 6 and the inner hollow column 2, and the uppermost is the workpiece platform 3 made of transparent material.

[0027] The lifting and rotating function device is composed of an inner hollow column 2 and an outer hollow column 6, the inner hollow column 2 and the outer hollow column 6 are fitted together, and the inner hollow column 2 can move and rotate up and down in the outer hollow column 6 under control . The top of the inner hollow column 2 and the middle part of the lower bottom of the workpiece table 3 can be fixedly connected or disassembled; when the inner hollow column 2 an...

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Abstract

The invention provides a small workpiece clamp of a lithographic machine, which is composed of a lifting and rotating functional device, a light spot positioning functional device and a fixing functional device, The lithographic machine is characterized in that the whole structure of the clamp is respectively a bottom base, an outer hollow column and an inner hollow column from bottom to top, andthe top is a workpiece table made of transparent material. A technology of the invention has the beneficial effect of fixing, support and positioning small-sized workpieces, so that the precision of machining is high; At the same time, the height and position of the workpiece can be adjusted, which reduces the machining difficulty. Furthermore, the machining position can be precisely positioned, the machining error caused by the inaccurate placement position in the secondary machining is avoided, and the machining operation steps are simplified.

Description

technical field [0001] The invention relates to a fixture for a lithography machine, which is mainly used for fixing, supporting, and positioning the workpiece when the lithography machine processes the workpiece, so as to facilitate the processing of the workpiece by the lithography machine. technical background [0002] At present, many laboratory lithography machines do not have more practical lithography machine fixtures, so it is difficult to fix small workpieces such as chips for fine processing; at the same time, small workpiece processing requires precise rotation and quick reset. Processing, when there is no special fixture for precise positioning of small workpieces, it is easy to cause movement of the workpiece during processing, thereby affecting the precision of fine machining of small workpieces. [0003] Therefore, there is a need for a special small workpiece fixture for photolithography machines that can quickly locate, fix and support small workpieces. Co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/20
Inventor 徐文峰廖晓玲黄秋红季小龙
Owner CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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