A loading and unloading device for integrated circuit material surface treatment equipment
A surface treatment, integrated circuit technology, applied in the field of loading and unloading devices, can solve the problems of low production efficiency, low automation level and high labor cost
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[0057] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation manners of the present invention will now be described in detail with reference to the accompanying drawings. In the description of this patent, it is to be understood that the terms "above", "below", "front", "rear", "left", "right", "vertical", "horizontal", "top ", "bottom", "inner", "outer" and other indicated orientations or positional relationships The orientations or positional relationships shown in the drawings are only for the convenience of describing this patent and simplifying the description.
[0058] Figure 1 to Figure 13 A preferred embodiment of the loading and unloading device for integrated circuit material surface treatment equipment of the present invention is shown.
[0059] The loading and unloading device for integrated circuit material surface treatment equipment of the present invention can be used for...
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