Method and system for restoring geometrical appearance of surface of concave region of object

Abstract

The invention discloses a method and system for restoring the geometrical appearance of the surface of a concave region of an object. According to the method, an interaction potential between an atomic force microscope tip in any shape and a measured object is expressed a function of a local principal curvature of the atomic force microscope tip; the tip rotates and two groups of acting force dataof a measured scanning point are recorded; the two groups of acting force data are compared to determine whether an obvious concave region occurs on the surface of the measured object; and if so, theheight of the atomic force microscope tip is adjusted twice, a vertical height between the atomic force microscope tip and the surface of the measured object is calculated based on a geometric approximation relationship, so that a real geometrical appearance of the obvious concave region of the surface of the measured object is restored. Therefore, the error of the atomic force microscope in thesurface concave region is corrected; a problem of image distortion of the existing atomic force microscope in the surface concave region is solved; and the detection precision of the surface concave region of the measured object is improved.

Description

technical field [0001] The invention relates to the technical field of atomic force microscopes, in particular to a method and system for restoring the surface geometric appearance of a concave region of an object. Background technique [0002] The atomic force microscope is a common micro-nano scale measurement tool, it is based on the functional relationship between the short-range interaction force and the distance between the needle tip and the measured object, by measuring the force, the relative height between the two is obtained, thus Restore the surface topography of the measured object. During the specific operation, the model of the needle tip usually has a spherical shape, a hemispherical shape, a conical shape, and a cylindrical shape. Considering that the size of the measured object is usually much larger than the needle tip, the measured object is abstracted as a semi-infinite planar body, and the interaction function between the needle tip and the semi-infini...

AI Technical Summary

Problems solved by technology

However, in areas with obvious surface depressions, the shortest distance between the needle tip and the measured object is often not the vertical height

At this time, according to the relationship between the force and the height, the measured vertical distance is not the real vertical distance, which leads to the decrease of the surface scanning accuracy and the distortion of the image.

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