Large focal spot confocal X ray spectral analyzing device

Abstract

The invention discloses a large focal spot confocal X ray spectral analyzing device. The device comprises an incident light path, a detecting light path, a sample adjusting frame and a spectral data analyzing terminal. The overlapping area of the incident light path and the detecting light path forms a detecting micro element. The sample adjusting frame is used for placing a sample to be detected,and adjusting the contact position and the size of the contact area of the sample to be detected and the detecting micro element. The spectral data analyzing terminal is connected to the detecting light path and the sample adjusting frame through a bus, and is used for receiving the ray spectral data obtained by the detecting light path and adjusting the sample adjusting frame. The incident lightpath comprises an X ray light source and a capillary X ray parallel beam lens. The detecting light path comprises a capillary X ray collimator and an X ray detector. According to the large focal spotconfocal X ray spectral analyzing device, the working distance and angle can be adjusted to receive the spectral information of samples at different angles.

Description

technical field [0001] The invention relates to a confocal X-ray spectrum analyzer, in particular to a large focal spot confocal X-ray spectrum analyzer. Background technique [0002] Confocal X-ray spectroscopic analysis technology is a new type of X-ray spectroscopic analysis technology that can perform three-dimensional non-destructive analysis of samples proposed by Soviet scientists Gibson and Kumakhov in 1993. Conventional confocal X-ray spectroscopic analysis equipment generally uses a combination of a capillary X-ray converging lens and a capillary X-ray parallel beam lens. Among them, the capillary X-ray converging lens has two front and rear focal points, which are used to converge the divergent X-rays emitted by the X-ray tube placed at the front focal point into a micro-focus spot of tens of microns; the capillary X-ray parallel beam lens and the X-ray detection The combined use of X-ray devices converts X-ray energy into electrical signals that can be recorded,...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a large focal spot confocal X-ray spectroscopic analysis device, which solves the problem that the existing confocal X-ray spectroscopic analysis device cannot obtain spectral signals of samples at different angles, and can adjust the working distance and angle, To receive spectral information of samples from different angles

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