Large focal spot confocal X ray spectral analyzing device

A spectral analysis and X-ray technology, which is applied in the direction of material analysis, measurement device, and material analysis using wave/particle radiation. , easy to adjust effect

Active Publication Date: 2019-01-11
北京市辐射中心 +1
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  • Description
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a large focal spot confocal X-ray spectroscopic analysis device, which solves the problem that the existing confocal X-ray spectroscopic analysis device cannot obtain spectral signals of samples at different angles, and can adjust the working distance and angle, To receive spectral information of samples from different angles

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  • Large focal spot confocal X ray spectral analyzing device
  • Large focal spot confocal X ray spectral analyzing device
  • Large focal spot confocal X ray spectral analyzing device

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Embodiment 1

[0047] A large focal spot confocal X-ray spectrum analysis device, the device includes: X-ray light source 1, capillary X-ray parallel beam lens 3, capillary X-ray collimator 7, X-ray detector 8, sample adjustment rack 5 and spectrum Data Analysis Terminal 9. Among them, the X-ray light source 1 and the capillary X-ray parallel beam lens 3 constitute the incident light path, and the capillary X-ray collimator 7 and the X-ray detector 8 constitute the detection light path; the overlapping area of ​​the incident light path and the detection light path constitutes the detection microelement.

[0048] The sample to be detected is placed on the sample adjustment rack 5, and the spectral data analysis terminal 9 can adjust the position and angle of the sample adjustment rack 5 to change the position and the size of the contact area between the sample to be tested and the detection micro-element. The X-ray light source 1 emits X-rays, which are incident on the sample to be tested on ...

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Abstract

The invention discloses a large focal spot confocal X ray spectral analyzing device. The device comprises an incident light path, a detecting light path, a sample adjusting frame and a spectral data analyzing terminal. The overlapping area of the incident light path and the detecting light path forms a detecting micro element. The sample adjusting frame is used for placing a sample to be detected,and adjusting the contact position and the size of the contact area of the sample to be detected and the detecting micro element. The spectral data analyzing terminal is connected to the detecting light path and the sample adjusting frame through a bus, and is used for receiving the ray spectral data obtained by the detecting light path and adjusting the sample adjusting frame. The incident lightpath comprises an X ray light source and a capillary X ray parallel beam lens. The detecting light path comprises a capillary X ray collimator and an X ray detector. According to the large focal spotconfocal X ray spectral analyzing device, the working distance and angle can be adjusted to receive the spectral information of samples at different angles.

Description

technical field [0001] The invention relates to a confocal X-ray spectrum analyzer, in particular to a large focal spot confocal X-ray spectrum analyzer. Background technique [0002] Confocal X-ray spectroscopic analysis technology is a new type of X-ray spectroscopic analysis technology that can perform three-dimensional non-destructive analysis of samples proposed by Soviet scientists Gibson and Kumakhov in 1993. Conventional confocal X-ray spectroscopic analysis equipment generally uses a combination of a capillary X-ray converging lens and a capillary X-ray parallel beam lens. Among them, the capillary X-ray converging lens has two front and rear focal points, which are used to converge the divergent X-rays emitted by the X-ray tube placed at the front focal point into a micro-focus spot of tens of microns; the capillary X-ray parallel beam lens and the X-ray detection The combined use of X-ray devices converts X-ray energy into electrical signals that can be recorded,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/00G01N23/20025G01N23/2204
CPCG01N23/00G01N23/20025G01N23/2204
Inventor 孙学鹏孙天希刘志国
Owner 北京市辐射中心
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