A large focal spot confocal X-ray spectroscopic analysis device

Abstract

The invention discloses a large focal spot confocal X-ray spectrum analysis device, which comprises: an incident optical path, a detection optical path, a sample adjustment frame and a spectral data analysis terminal. The overlapping area of ​​the incident light path and the detection light path constitutes the detection micro-unit; the sample adjustment frame is used to place the sample to be tested, and adjust the position and contact area between the sample to be tested and the detection micro-unit; the spectral data analysis terminal and the detection light path and sample adjustment The racks are connected through the bus, and are used to receive the ray spectrum data obtained by the detection optical path and control the sample adjustment rack. The incident light path includes: X-ray light source and capillary X-ray parallel beam lens. The detection optical path includes: a capillary X-ray collimator and an X-ray detector. The device of the invention can adjust the working distance and angle to receive spectral information of samples with different angles.

Description

technical field [0001] The invention relates to a confocal X-ray spectrum analyzer, in particular to a large focal spot confocal X-ray spectrum analyzer. Background technique [0002] Confocal X-ray spectroscopic analysis technology is a new type of X-ray spectroscopic analysis technology that can perform three-dimensional non-destructive analysis of samples proposed by Soviet scientists Gibson and Kumakhov in 1993. Conventional confocal X-ray spectroscopic analysis equipment generally uses a combination of a capillary X-ray converging lens and a capillary X-ray parallel beam lens. Among them, the capillary X-ray converging lens has two front and rear focal points, which are used to converge the divergent X-rays emitted by the X-ray tube placed at the front focal point into a micro-focus spot of tens of microns; the capillary X-ray parallel beam lens and the X-ray detection The combined use of X-ray devices converts X-ray energy into electrical signals that can be recorded,...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a large focal spot confocal X-ray spectroscopic analysis device, which solves the problem that the existing confocal X-ray spectroscopic analysis device cannot obtain spectral signals of samples at different angles, and can adjust the working distance and angle, To receive spectral information of samples from different angles

Images