High-precision sputtering thin-film pressure sensor with wide temperature range and its manufacturing method
A pressure sensor, sputtering film technology, applied in instruments, measuring force, measuring devices, etc., can solve the problems of inaccurate pressure measurement and narrow temperature range, and achieve the effect of improving measurement accuracy, wide temperature adaptation range and high precision
A pressure sensor, sputtering film technology, applied in instruments, measuring force, measuring devices, etc., can solve the problems of inaccurate pressure measurement and narrow temperature range, and achieve the effect of improving measurement accuracy, wide temperature adaptation range and high precision
CN109238524BActive Publication Date: 2020-12-18XIAN AEROSPACE PROPULSION INST
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[0048] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0049] Such as Figure 1-5As shown, the high-precision sputtering film pressure sensor with wide temperature range of the present invention includes a housing 1, a pressure port 2, a sensitive element 3 and an adapter assembly 4, and the pressure interface 2, the sensitive element 3, and the adapter assembly 4 are connected in sequence, The sensitive element 3 and the adapter assembly 4 are arranged in the casing 1; the adapter assembly and the pressure interface are fixedly arranged at both ends of the casing, and the adapter assembly 4 includes a signal input terminal adapter assembly 41 and a signal output terminal connected by a wire 42 End transfer assembly 43, the sensitive element 3 includes a transition layer 31, an insulating layer 32 and a circuit layer arranged at the end of the pressure interface 2; the circuit layer is provided with a pressure measuremen...
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The invention relates to a wide-temperature-range high-precision sputtering film pressure sensor and a manufacturing method thereof. A sensitive element in the sensor comprises a transition layer, aninsulating layer and a circuit layer which are arranged at the end part of a pressure interface; the circuit layer is provided with a pressure measuring circuit and a temperature compensation circuit;an adapter base is fixedly arranged on the sensitive element; a plurality of electric connecting pieces are circumferentially and uniformly arranged on the adapter base; each electric connecting piece comprises an arc-shaped bonding pad and an inserting pin which are connected with each other; the arc-shaped bonding pads are horizontally arranged on the adapter base; the inserting pins are perpendicular to the adapter base, and the bottoms of the inserting pins are fixed through bumps; a leading-out signal of the sensitive element penetrates through the adapter base to be connected with the arc-shaped bonding pad; a protective plate is arranged above the bumps to cover the adapter base; the inserting pin penetrates through the protective plate to be welded with one end of a lead wire; andthe outer side of a whole after welding of the inserting pin and the lead wire is further subjected to contour welding reinforcement through a metal wire. The pressure sensor solves the technical problems that an existing pressure sensor is relatively narrow in using temperature range, inaccurate in pressure measurement and not suitable for application under severe conditions of strong vibration,large impact and the like.
Description
technical field [0001] The invention relates to a pressure sensor, in particular to a pressure sensor with temperature compensation and a manufacturing method thereof. Background technique [0002] Sensor technology runs through the entire process of liquid rocket engine development. High-precision, high-stability, and high-reliability special sensor technology is an important guarantee for the development of liquid rocket engines. With the development of a new generation of liquid oxygen kerosene engines and heavy-duty engines, the application of high thrust and clean propellants increases the measurement range of the sensor, and the working environment conditions are even harsher. It is necessary to withstand harsh conditions such as high and low temperature, strong vibration, and large impact. . [0003] The problems that must be solved in the pressure measurement of the liquid oxygen pipeline of the liquid oxygen kerosene engine, gas generator, etc. are: [0004] 1. Wi...
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Patent Timeline
18 Dec 2020
Publication
CN109238524B
- IPC
- G01L1/22
- CPC
- G01L1/225; G01L1/2281
- Inventors
- 陈鹏飞; 李伟