High-precision sputtering thin-film pressure sensor with wide temperature range and its manufacturing method

Abstract

The invention relates to a wide-temperature-range high-precision sputtering film pressure sensor and a manufacturing method thereof. A sensitive element in the sensor comprises a transition layer, aninsulating layer and a circuit layer which are arranged at the end part of a pressure interface; the circuit layer is provided with a pressure measuring circuit and a temperature compensation circuit;an adapter base is fixedly arranged on the sensitive element; a plurality of electric connecting pieces are circumferentially and uniformly arranged on the adapter base; each electric connecting piece comprises an arc-shaped bonding pad and an inserting pin which are connected with each other; the arc-shaped bonding pads are horizontally arranged on the adapter base; the inserting pins are perpendicular to the adapter base, and the bottoms of the inserting pins are fixed through bumps; a leading-out signal of the sensitive element penetrates through the adapter base to be connected with the arc-shaped bonding pad; a protective plate is arranged above the bumps to cover the adapter base; the inserting pin penetrates through the protective plate to be welded with one end of a lead wire; andthe outer side of a whole after welding of the inserting pin and the lead wire is further subjected to contour welding reinforcement through a metal wire. The pressure sensor solves the technical problems that an existing pressure sensor is relatively narrow in using temperature range, inaccurate in pressure measurement and not suitable for application under severe conditions of strong vibration,large impact and the like.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a pressure sensor with temperature compensation and a manufacturing method thereof. Background technique [0002] Sensor technology runs through the entire process of liquid rocket engine development. High-precision, high-stability, and high-reliability special sensor technology is an important guarantee for the development of liquid rocket engines. With the development of a new generation of liquid oxygen kerosene engines and heavy-duty engines, the application of high thrust and clean propellants increases the measurement range of the sensor, and the working environment conditions are even harsher. It is necessary to withstand harsh conditions such as high and low temperature, strong vibration, and large impact. . [0003] The problems that must be solved in the pressure measurement of the liquid oxygen pipeline of the liquid oxygen kerosene engine, gas generator, etc. are: [0004] 1. Wi...

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Problems solved by technology

[0007] In order to solve the technical problems that the existing pressure sensor has a narrow operating temperature range, inaccurate pressure measurement, and is not suitable for application under harsh conditions such as strong vibration and large impact, the present invention provides a high-precision sputtering film pressure sensor with a wide temperature range and its production method

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