MEMS humidity sensor and operation method thereof

Abstract

The invention relates to the technical field of sensors, and discloses an MEMS humidity sensor and an operation method thereof. The humidity sensor comprises a substrate, a first insulating layer located above the substrate, and a piezoelectric sensor unit and an electrochromic unit which are located above the first insulating layer and arranged at intervals; the piezoelectric sensor unit is connected with one side of the electrochromic unit through a display switch unit; a reset switch unit is arranged on the other side of the electrochromic unit; and when the display switch unit is switchedon and the reset switch unit is switched off, the piezoelectric sensor unit is deformed after absorbing moisture and generates a piezoelectric voltage, and the electrochromic unit generates a reactionunder the action of the piezoelectric voltage so as to display humidity information through color change. According to the MEMS humidity sensor, a complex interface circuit does not need to be additionally arranged, and the humidity information of a current environment can be obtained directly and quickly through human eyes; and the sensor has the advantages of being simple to design and manufacture, low in cost, small in size, low in power consumption and the like.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a MEMS humidity sensor which displays humidity through color and an operation method thereof. Background technique [0002] Humidity sensors are used to measure environmental humidity and are widely used in national economy and people's livelihood fields such as meteorological monitoring, industrial and agricultural production, and medical diagnosis. Compared with traditional humidity sensors (such as wet and dry bulbs), MEMS (Micro-Electro-Mechanical System, micro-electromechanical system) humidity sensors have the characteristics of small size, low power consumption, good consistency, easy integration and easy realization of intelligence, etc. , therefore, is one of the important directions for the development of humidity sensors. [0003] The existing MEMS humidity sensor is mainly based on the sensitive structure (or sensitive material) to convert the environmental humidity ...

AI Technical Summary

Problems solved by technology

However, the use of the interface circuit helps to improve the measurement accuracy of the sensor on the one hand; on the other hand, it also increases the difficulty and cost of the design and preparation of the sensor, and increases the power consumption of the sensor. For fields with strict requirements on power consumption but no high requirements on its accuracy (such as portable consumer electronics products such as smart phones), the above-mentioned solutions are becoming more and more difficult to meet the needs of technological development

Images