Variable RF MEMS Switches
A micro-electromechanical switch and radio frequency technology, applied in electrical switches, circuits, relays, etc., can solve the problems of complex manufacturing process, high manufacturing cost, high resistivity loss of RF lines, etc., and achieve the effect of reducing temperature sensitivity and reducing manufacturing cost.
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[0055] Figure 1 shows a top view of a switch according to the invention. The first RF line 3 is electrically connected to the MEMS membrane 5 through the anchor 51 , thereby allowing the RF signal to propagate in the first RF line 3 through the MEMS membrane 5 . The second RF line 4 has a first portion 41 in contact with the face 21 of the substrate 2 and a second portion 42 partially covering the dome 6 . These two parts are electrically connected to each other, thereby allowing the RF signal passing through the first part 41 to propagate in the second part 42 ( Figure 1a ).
[0056] A second portion comprising the MEMS membrane 5 and dielectric (including the dielectric layer of the dome and any air layer between the membrane 5 and the dielectric layer of the dome if the membrane 5 is not fully deflected), and the second RF line 4 A stack of 42 forms a capacitor. Signals propagate from one RF line to the other through the stack. The capacitance is higher when the membran...
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