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Variable RF MEMS Switches

A micro-electromechanical switch and radio frequency technology, applied in electrical switches, circuits, relays, etc., can solve the problems of complex manufacturing process, high manufacturing cost, high resistivity loss of RF lines, etc., and achieve the effect of reducing temperature sensitivity and reducing manufacturing cost.

Active Publication Date: 2020-06-30
UNIV DE LIMO +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this configuration has the disadvantage of causing high resistivity of the RF line and losses due to stray capacitance
In addition, the production of this MEMS uses many process steps, which makes the manufacturing process complicated and expensive

Method used

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  • Variable RF MEMS Switches
  • Variable RF MEMS Switches
  • Variable RF MEMS Switches

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0055] Figure 1 shows a top view of a switch according to the invention. The first RF line 3 is electrically connected to the MEMS membrane 5 through the anchor 51 , thereby allowing the RF signal to propagate in the first RF line 3 through the MEMS membrane 5 . The second RF line 4 has a first portion 41 in contact with the face 21 of the substrate 2 and a second portion 42 partially covering the dome 6 . These two parts are electrically connected to each other, thereby allowing the RF signal passing through the first part 41 to propagate in the second part 42 ( Figure 1a ).

[0056] A second portion comprising the MEMS membrane 5 and dielectric (including the dielectric layer of the dome and any air layer between the membrane 5 and the dielectric layer of the dome if the membrane 5 is not fully deflected), and the second RF line 4 A stack of 42 forms a capacitor. Signals propagate from one RF line to the other through the stack. The capacitance is higher when the membran...

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PUM

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Abstract

The present invention relates to a radio frequency microelectromechanical switch (often using the acronym RF MEMS) and a method of making such a switch.

Description

technical field [0001] The present invention generally relates to a radio frequency microelectromechanical switch (often using the acronym RF MEMS) and a method of making such a switch. Background technique [0002] A switch in the context of the present invention refers to an electrical or electronic component capable of changing, under the influence of external commands, the level of power transmitted in at least 2 completely different states. [0003] As the need for wireless data transmission increases, the need for reconfigurable radio frequency (RF) components continues to grow. Indeed, the increase in telecommunication standards complicates the architecture of devices and requires the integration of reconfigurable components. RF MEMS switches are one of the most powerful options to meet the above requirements, especially due to their low electrical losses, high linear behavior and low power consumption compared to conventional semiconductors. [0004] These RF MEMS ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01H59/00
CPCH01H1/0036H01H59/0009H01H2001/0084H01H2001/0089H01H2059/0072B81C1/00134
Inventor 罗曼·斯特凡尼尼张岭岩皮埃尔·布隆迪法宾·鲁博凯文·纳多
Owner UNIV DE LIMO