Mask device and sputtering system
A technology of masks and mask strips, applied in the field of mask plates, can solve the problems of large shadows in sputtering film formation and low product yields, and achieve the effects of improving product yields, eliminating gaps, and avoiding shadows
Active Publication Date: 2019-02-19
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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- Application Information
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Problems solved by technology
[0004] Embodiments of the present invention provide a mask device and a sputtering system, which can solve the problem of relatively large sputtering film formation shadows in the prior art due to the large gap between the mask strip and the substrate, resulting in low product yields. The problem
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[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0029] An embodiment of the present invention provides a mask device, such as Figure 3 to Figure 10 As shown, it includes a mask plate 10 and a plurality of mask strips 11 arranged on one side of the mask plate 10; at least one mask strip 11 is provided with a plurality of strip-shaped metal strips on the surface near the mask plate 10 side Structure 12 , a plurality of metal structures 12 are arranged at intervals along the length direction of the mask strip...
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Abstract
The embodiment of the invention provides a mask device and a sputtering system, and relates to the technical field of mask plates. The problem that in the prior art, the sputtering film forming shadowis large due to the fact that the gap between mask strips and a substrate is large, and as a result, the product yield is low can be solved. The mask device comprises a mask plate and a plurality ofmask strips; and the surface of the side, close to the mask plate, of at least one mask strip is provided with a plurality of strip-shaped metal structures, the multiple metal structures are arrangedin the length direction of the mask strips at intervals, and the thermal expansion coefficient of the metal structures is larger than that of the mask strips. The mask device and the sputtering systemare used for sputtering film forming.
Description
technical field [0001] The invention relates to the technical field of mask plates, in particular to a mask device and a sputtering system. Background technique [0002] With the rapid development of display technology, users' requirements for large-size display and image quality are gradually increasing. Large-size OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display devices are more and more popular among users due to their many advantages. of favor. Existing OLED devices usually consist of an anode layer, a light emitting layer and a cathode layer. According to the light output direction, it can be divided into two types: bottom-emitting devices and top-emitting devices. Because the top-emitting device can obtain a larger aperture ratio and can significantly improve the brightness of the screen, it has become a hot research topic in recent years. OLED top-emitting devices require a transparent cathode to increase light transmittance, and the transp...
Claims
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IPC IPC(8): C23C14/04C23C14/34
CPCC23C14/042C23C14/34
Inventor 姚固熊腾青李如
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD