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364results about How to "Avoid shadows" patented technology
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Electronic endoscope
InactiveUS6476851B1Correct distortionAvoid shadowsTelevision system detailsEndoscopesOptical axisLight beam
An electronic endoscope includes an objective lens system in which chief rays directed toward the maximum image height are inclined outwardly with respect to the optical axis and a solid-state image sensor which has a light-receiving surface on which many pixels are arrayed and which provides a light beam inclined outwardly with respect to the optical axis and incident on the light-receiving surface with a higher power, in separating from the center of the light-receiving surface, than a light beam incident perpendicularly on the light-receiving surface. In doing so, distortion is favorably corrected and shading can be prevented.
Owner:OLYMPUS OPTICAL CO LTD
Automatic image capture
ActiveUS8559766B2Solve the lack of brightnessSolve lack of contrastTelevision system detailsCharacter and pattern recognitionDisplay deviceSingle image
An improved automatic image capture system for an intelligent mobile device having a camera guides a user to position the camera so only a single image needs to be automatically captured. A trapezoidal view finder on a display of the intelligent mobile device may be used to orient the camera with respect to a target document so there is an appropriate pitch and roll angle between the camera and the target document to avoid shadows caused by the camera or user. Further the user is guided to maximize the occupancy of the view finder with the document so that the document is maximized within the view finder. When all requisite conditions are satisfied, the camera automatically captures the image of the document for post-processing.
Owner:NORTHWEST IP LLC
Flat fluorescent lamp with specific electrode structuring
InactiveUS6034470AReduce the numberReduce productionDischarge tube luminescnet screensLamp detailsElectrical conductorEngineering
PCT No. PCT / DE98 / 00827 Sec. 371 Date Nov. 17, 1998 Sec. 102(e) Date Nov. 17, 1998 PCT Filed Mar. 20, 1998 PCT Pub. No. WO98 / 43277 PCT Pub. Date Oct. 1, 1998A flat fluorescent lamp (1) has a discharge vessel (2) having a base plate (7), a top plate (8) and a frame (9) which are connected to one another in a gas-tight fashion by means of solder (10). Structures resembling conductor tracks function in the interior of the discharge vessel as electrodes (3-6), in the feedthrough region as feedthroughs, and in the external region as external supply leads (13; 14). Flat lamps of the most different sizes can thereby be produced simply in engineering terms and in a fashion capable of effective automation. Moreover, virtually any electrode shapes can be realized, in particular optimized with regard to a uniform luminous density with a reduced drop in luminous density towards the edges of the flat lamp. At least the anodes (5, 6) are covered in each case with a dielectric layer (15). The lamp (1) is preferably operated by means of a pulsed voltage source and serves as background lighting for LCDs, for example in monitors or driver information displays.
Owner:PATENT TREUHAND GESELLSCHAFT FUR ELECTRIC GLUEHLAMPEN MBH
Electrical power tool
InactiveUS8016048B2Avoid shadowsEasy to placeDrilling rodsLighting support devicesRotational axisEngineering
Owner:KOKI HLDG CO LTD
Photovoltaic power station automatic inspection system based on unmanned aerial vehicle
InactiveCN109187558AAvoid shadowsPhotovoltaic monitoringMaterial flaws investigationCells panelReal-time data
The invention relates to a photovoltaic power station automatic inspection system based on an unmanned aerial vehicle. The system is used for monitoring real-time operation condition of a photovoltaicpower station and detecting whether problems such as contamination and hot spots exist in a photovoltaic cell panel or not. The system comprises the unmanned aerial vehicle, a route design module, anonboard module, an image processing module, a communication module, a fault reconfirmation module and a ground workstation. The route design module is used for planning an inspection route of the unmanned aerial vehicle. The onboard module is composed of a camera and an infrared thermal imager and is used for collecting real-time images, pictures and thermal images of a photovoltaic module. The communication module is used for transmitting real-time data back to the ground workstation and receiving control instructions. The image processing module is used for processing image data and judgeswhether a fault exists in the photovoltaic cell panel or not. The fault reconfirmation module is used for carrying out fault reconfirmation on a suspected fault module, thereby preventing misjudgment.According to the system, the photovoltaic power station is automatically inspected, inspection efficiency is effectively improved, cost investment is reduced, and a fault point is discovered rapidly.
Owner:CENT SOUTH UNIV
Solid state image capturing device and electronic information device
InactiveUS20090046186A1Avoid shadowsHigh sensitivityTelevision system detailsTelevision system scanning detailsFloating diffusionElectronic information
A solid-state image capturing device having a two pixel sharing structure is provided. A reset section for resetting electric potential of the floating diffusion to a predetermined electric potential and a signal amplifying section for amplifying a signal in accordance with voltage of the floating diffusion to read out the signal are separately arranged. An active region of the reset section is configured to function as an active region of the floating diffusion. A wiring extending from the floating diffusion to a control electrode of the signal amplifying section is formed to be a first layer of a metal wiring having a layout of a straight line with a shortest length. Centers of the light receiving sections are oriented to centers of pixels and the centers of the pixels are arranged at regular optical intervals.
Owner:SHARP KK
Multiple-input-multiple-output radar waveform design method
ActiveCN104898113AEasy to detectImprove efficiencyRadio wave reradiation/reflectionFrequency spectrumMultiple input
A multiple-input-multiple-output radar waveform design method belongs to the radar communication technical field, and aims to provide a design method with lower related sidelobe and frequency spectrum inhibition depth, high efficiency, less consumption, high robustness, and excellent time frequency anti-interference performance; the method comprises the following steps: pre-evaluating an autocorrelation sidelobe inhibition fuzzy region according to a relative position between a strong scatterer and a to be measured object in a radar scene, thus forming a corresponding object function; analyzing MIMO radar waveform orthogonality constraint so as to form the object function satisfying the orthogonality constraint; pre-evaluating a frequency domain interference fuzzy frequency band zone according to scene prior information, thus forming the corresponding object function; forming a constant modulus phase coding waveform constrained condition; forming a loose alternative projection algorithm framework; solving a waveform design according to the loose alternative projection algorithm framework, thus providing three waveform optimization output modes. The loose alternative projection constant modulus waveform coding design enables the MIMO radar to have batter detection performance.
Owner:HARBIN INST OF TECH +1
SiGe or germanium flip chip optical receiver
InactiveUS6980748B2Easy transferEasy to optimizeSemiconductor/solid-state device detailsSolid-state devicesHemt circuitsOptical clock
A synchronized optical clocking signal is provided to a plurality of optical receivers by providing a layer of a high absorption coefficient material, such as SiGe or Ge, on a front surface of a low absorption coefficient substrate, such as silicon. Diodes are formed in the germanium containing layer for receiving an optical signal and converting the optical signal into an electrical signal. An optical clocking signal is shined on the back surface of the silicon substrate. The light has a wavelength long enough so that it penetrates through the silicon substrate to the germanium containing layer. The wavelength is short enough so that the light is absorbed in the germanium containing layer and converted to the electrical clocking signal used for neighboring devices and circuits. The germanium concentration is graded so that minority carriers are quickly swept across junctions of the diodes and collected.
Owner:IBM CORP
360° imaging system
ActiveUS20130222684A1Avoid shadowsTelevision system detailsColor television detailsEngineeringCantilever
A 360 degree camera imaging system comprising a first horizontal boom having a first end, a second end, and a middle section; a second horizontal boom having a first end and a second end; a first vertical arm having a first end and a second end; a second vertical arm having a first end and a second end; and a mounting bracket. The first horizontal boom is connected to the first end of the second horizontal boom by a first rotatable pivot proximate the middle section of the first horizontal boom, and the second end of the second horizontal boom is connected to the mounting bracket. The first end of the first vertical arm is affixed to the first end of the first horizontal boom, and the first end of the second vertical arm is affixed to the second end of the first horizontal boom. A camera is mounted to the first vertical arm, and a backdrop is mounted to the second vertical arm.
Owner:OVIO TECH INC
Electrical Power Tool
An electrical power tool includes a housing, an electrical motor, an end-bit holding section, a transmitting mechanism, a cap, and a lighting section. The housing has one end. The electrical motor is accommodated in the housing and is configured to generate a rotational driving force. The end-bit holding section is provided at the one end and is rotatable about a rotational axis. The transmitting mechanism transmits the rotational driving force to the end-bit holding section. The cap is attached to the one end. The lighting section allows an entirety of the cap to be luminous.
Owner:HITACHI KOKI CO LTD
Light guide structure for a keyboard
InactiveUS20100148996A1Enhance uniform backlight illuminationAvoid shadowsLegendsElectronic switchingLight guideLight reflection
A light guide structure for a keyboard. The light guide structure includes a transparent rubber sheet. Multiple resilient support sections are formed on the rubber sheet in alignment with press keys of the keyboard respectively. Multiple diffusive reflection units are disposed on a surface of the rubber sheet and circumferences of the resilient support sections. The diffusive reflection units are boss sections protruding from the surface of the rubber sheet or recessed sections formed on the surface of the rubber sheet. Each diffusive reflection unit has a surface coated with a light reflection layer for reflecting light. When the light is reflected by external components back to the surface of the rubber sheet, the light reflection layers of the diffusive reflection units that are boss sections or recessed sections will again effectively reflect the light to enhance backlight brightness of the press keys and peripheries thereof.
Owner:KINPO ELECTRONICS
Mugfet with stub source and drain regions
InactiveUS20090302402A1Low densityAvoid shadowsTransistorSolid-state devicesEngineeringSemiconductor
The present invention provides a semiconductor device that includes at least one semiconductor Fin structure atop the surface of a substrate; the semiconducting fin structure including a channel of a first conductivity type and source / drain regions of a second conductivity type, the source / drain regions present at each end of the semiconductor fin structure; a gate structure immediately adjacent to the semiconductor fin structure, a dielectric spacer abutting each sidewall of the gate structure wherein the each end of the fin structure extends a dimension that is less than about ¼ a length of the Si-containing fin structure from a sidewall of the dielectric spacer; and a semiconductor region to the each end of the semiconductor fin structure, wherein the semiconductor region to the each end of the semiconductor fin structure is separated from the gate structure by the dielectric spacer.
Owner:GLOBALFOUNDRIES INC
Tabbed transfer fins for air-cooled heat exchanger
InactiveUS20060169019A1Increase heat transfer rateMinimizing creationSpacing meansMechanical apparatusEngineeringHeat exchanger
Heat transfer fins (110), and heat exchangers (100) incorporating such fins (110), enhancing heat transfer with acceptable pressure drop increase. The fins (110) include tabs or secondary fins bent upward and downward from the fin body at a selected bend angle. All or a majority of the tabs are aligned with a simple flow path or with local flow paths for cooling air adjacent the fins (110) to minimize turbulence and pressure drop. The tabs are planar and generally aligned parallel to the simple flow path or local flow paths and are arranged so as to serve as a plurality of sites for starting new boundary layers by offsetting the tabs such that downstream tabs are not shadowed by upstream tabs. The tabs have a height sufficiently large to extend the tabs out into boundary layers on the fin (110). The tabs provide more uniform flow over fins (110) and shrink wake size behind tubes (120).
Owner:ALLIANCE FOR SUSTAINABLE ENERGY
Solar energy tracking method with umbra versa tracking
ActiveCN103149947AReduce energy consumptionRealize the purpose of energy savingControl using feedbackAdaptive controlAstronomical algorithmGeolocation
The invention relates to a tracking method aiming at single axis solar energy and provides a solar energy tracking method with umbra versa tracking. The solar energy tracking method with the umbra versa tracking accurately calculates positions of the Sun based on modern astronomical algorithms, calculates shadow length of solar panel assemblies and adjusts angles of the solar panel assemblies according to the width of the assemblies and distance between the front and back rows of the solar panel assemblies. Therefore, at any time no shadow can be generated along the east-and-west directions of the front and back rows of the solar panel assemblies, the effects that the sun light is perpendicular to the solar panel assemblies and the light intensity is maximized are achieved, and the photovoltaic conversion rate is increased. The solar energy tracking method with the umbra versa tracking is small in energy consumption, applicable to various latitudes, free from the restraint of the geographical location, capable of being directed at the Sun to the maximum extent and receiving direct solar radiation and capable of effectively avoiding that the east and west assemblies are shaded by the shadow. The technical problems existing in the prior art that the solar panel assemblies shade each other and form the shadows, the sun light receiving is affected, and thereby the photovoltaic conversion rate is affected are solved.
Owner:VERSOLSOLAR HANGZHOU
Large-angle diffusing optical lens
ActiveCN103062705AAvoid the problem of bright circlesReduced package tolerance requirementsPoint-like light sourceCondensersOptoelectronicsLight source
Owner:TPV DISPLAY TECH (XIAMEN) CO LTD
Multi-gated, high-mobility, density improved devices
Disclosed herein are embodiments of an improved method of forming p-type and n-type MUGFETs with high mobility crystalline planes in high-density, chevron-patterned, CMOS devices. Specifically, semiconductor fins are formed in a chevron layout oriented along the centerline of a wafer. Gates are formed adjacent to the semiconductor fins such that they are approximately perpendicular to the centerline. Then, masked implant sequences are performed, during which halo and / or source / drain dopants are implanted into the sidewalls of the semiconductor fins on one side of the chevron layout and then into the sidewalls of the semiconductor fins on the opposite side of the chevron layout. The implant direction used during these implant sequences is substantially orthogonal to the gates in order to avoid mask shadowing, which can obstruct dopant implantation when separation between the semiconductor fins in the chevron layout is scaled (i.e., when device density is increased).
Owner:GLOBALFOUNDRIES INC
Black fluorescent ink
The invention provides a black fluorescent ink which mainly comprises 5-50% of fluorescent material, 5-40% of black pigment, 1-40% of blue pigment, 10-60% of linking material, 0.1-40% of filler, 2-60% of adjuvant. The linking material is one or more of phenolic resin, alkyd resin, rosin ester, polyamide resin, acrylic resin and acrylic acid derivative.
Owner:CHINA BANKNOTE PRINTING & MINTING
Rescue unmanned aerial vehicle and regulating and controlling fire fighting system thereof
ActiveCN106828899APrecise positioningLower requirementClimate change adaptationFire rescueElectrical batteryUncrewed vehicle
The invention relates to a rescue unmanned aerial vehicle and a regulating and controlling fire fighting system thereof. The rescue unmanned aerial vehicle comprises an unmanned aerial vehicle body, an executive module arranged on the unmanned aerial vehicle body, a control terminal controlling the unmanned aerial vehicle body and the executive module in a wireless mode, and a battery used for providing electric energy for the executive module. The unmanned aerial vehicle body is provided with three or more shafts driven by corresponding motors correspondingly. The executive module comprises an illuminating system, a radar life detector and a GPS locating system and / or a high-definition camera. A rescue vehicle group comprises ten or more detection breaking unmanned aerial vehicles, ten or more water spraying unmanned aerial vehicles and ten or more fire ball extinguishment unmanned aerial vehicles. According to the rescue unmanned aerial vehicle and the regulating and controlling fire fighting system thereof, design is reasonable, the structure is reasonable, and usage is convenient.
Owner:RUNTAI RESCUE EQUIP TECH HEBEI CO LTD
Light-emitting diode shelf
InactiveUS7413321B2Comfortable lightPrevent glareMechanical apparatusLighting elementsLight guideEngineering
Owner:LED FOLIO CORP
Automated optical inspection (AOI)-based bullet apparent defect detection method
InactiveCN104122271AAchieve complete detectionAccurate and comprehensive image acquisitionImage analysisOptically investigating flaws/contaminationImaging processingFeature extraction
The invention discloses an automated optical inspection (AOI)-based bullet apparent defect detection method including (1) using a CCD (charge coupled device) linear array camera to shoot the bullet surface to obtain a bullet surface initial gray level image; (2) sequentially denoising, enhancing and segmenting the initial gray level image for pretreatment to obtain a binaryzation image; (3) performing connected domain labeling processing on the binaryzation image to obtain a pixel dot set of all defects on the bullet surface; (4) respectively extracting the characteristics of each defective area; and (5) comparing the extracted characteristic values with preset defect standard features to determine the type of each defect. The method is based on the automatic optical inspection, designs a whole set of bullet apparent defect detection programs, and through the precision comprehensive image acquisition, fast image processing algorithm and convenient and accurate feature extraction and recognition, complete bullet apparent defect detection can be efficiently and accurately implemented.
Owner:NINGBO MOSHI OPTOELECTRONICS TECH
Device for correcting illumination homogeneity
ActiveCN101221373AAvoid light leakageAvoid shadowsPhotomechanical exposure apparatusMicrolithography exposure apparatusTransmittanceLight beam
The invention provides a lighting evenness correcting device arranged near a mask plate or near the optical conjugate planes of the mask plate. The device comprises a plurality of correcting component pairs arranged on the cross section of an illuminating beam, wherein the correcting component pairs are arranged at intervals in a non-scan direction and are overlapped in scanning direction; moreover, the correcting component pairs comprises a first correcting component inserted into a rectangular illumination field in scanning direction and a second correcting component inserted into the rectangular illumination field in a direction opposite to the scanning direction; the first correcting component and the second correcting component are in the shape of parallel flat plates on the section of the scanning direction and light beam transmission direction, and can respectively complete at least one dimensional motion in the scanning direction; both correcting components are provided with opposite transmittance distribution changing with position. The invention can prevent light leakage and shadow caused by the gap formed between adjacent correcting components; meanwhile, the invention can control the distribution of integral energy in the scanning direction and the evenness of the entire illumination field.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
Headlamp for vehicle
ActiveCN1920378AHigh luminous intensityEfficient use ofVehicle headlampsPoint-like light sourceEllipseOptical axis
Owner:KOITO MFG CO LTD
Imaging lens
ActiveUS20050275950A1Substantial aperture efficiencyCorrect distortionLensNegative powerConditional expression
An imaging lens (100) comprising, arranged sequentially from the object side, a positive-meniscus first lens (1) with its convex plane facing the object side, a negative-power-meniscus second lens (2), and a positive-power third lens (3), the second and third lenses (2, 3) functioning as correction lenses. The first lens (1) has a strong power, and both the second and third lenses (2, 3) are aspherical on opposite planes. When the synthetic focal distance of the imaging lens is f, the focal distance of the first lens f1, the distance from the incident surface on the object side to the imaging surface of the first lens (1) Σd, and the Abbe number of the second lens {square root}d2, the following conditional expressions are satisfied. 0.50<f1 / f<1.5 (1) 0.50<Σd / f<1.5 (2) 50>{square root}d2 (3). Accordingly, a small, low-cost imaging lens capable of high-quality imaging can be realized.
Owner:MAXELL FINETECH
Water surface lens cover
ActiveCN105137702AAvoid enteringAvoid shadowsTelevision system detailsColor television detailsBuoyancyPhysics
The invention provides a water surface lens cover. The water surface lens cover comprises a lens cover body, wherein the lens cover body is provided with a lens hole and an observation hole which are corresponding to a camera arranged in an accommodating chamber, the lens hole is connected with a glass lens in a sealed manner, and the observation hole is connected with a glass square piece in a sealed manner; a transparent hemisphere cover connected to the upper end of the lens cover body in a sealed manner; the accommodating chamber which is integrally formed on the bottom part of the lens cover body; a locking device which comprises a PC back door movably connected with one side of the accommodating chamber and a locking buckle movably connected to the other side of the accommodating chamber and correspondingly locked with the PC back door, wherein when the locking buckle and the PC back door are locked, the PC back door is in sealed connection with the accommodating chamber; waterproof buttons, wherein the number of the waterproof buttons is at least one, the waterproof buttons are connected to the side edge of the accommodating chamber in a sealed manner, and the waterproof buttons and buttons of the camera arranged in the accommodating chamber are in one-to-one correspondence; and a buoyancy rod which is movably hinged with the lens cover body or the accommodating chamber. According to the technical scheme, a half-overwater and half-underwater photograph can be easily shot.
Owner:深圳市泰迅数码有限公司
Optical Lens
The invention relates to an optical lens utilized for disposing above a light source. The optical lens has rotational symmetry relative to the central axis thereof. The central axis of the optical lens aligns with the center of the light source. The optical lens includes a bottom surface, an emergence surface with arc shape, an incidence surface with arc and concave shape, a curved surface with annular and concave shape and a light diffusing structure. The emergence surface connects a side of the bottom surface. The incidence surface connects another side of the bottom surface and lies in the middle of the bottom surface. The curved surface lies on the bottom surface and connects the incidence surface. The light diffusing structure is disposed on the curved surface. The invention improves the distribution of light projected on a light receiving surface and prevents a bright circle formed on the light receiving surface as a result of a gap that is formed by assembly tolerance of the optical lens and the light source.
Owner:TPV DISPLAY TECH (XIAMEN) CO LTD
Light-emitting device with enlarged area of active luminescence region
InactiveUS20050156177A1Enhanced brightnessUniform brightnessSemiconductor/solid-state device detailsSolid-state devicesPhysicsInsulation layer
A light-emitting device is provided, having an enlarged area of active luminescence region to enhance the brightness, mainly comprising a second epitaxy layer and at least one first epitaxy layer provided on a die substrate in turn. On the top surface of the first epitaxy layer, there are provided with at least one first electrode, and a plurality of second electrodes passing through the first epitaxy layer, insulated with the first epitaxy layer by means of an electrode insulation layer, and electrically connected to the second epitaxy layer, in which the first electrode and the second electrodes are alternately arranged. Moreover, first power supply circuits and second power supply circuits are provided on a power supply substrate at positions based on the locations of the first electrode and second electrodes so as to be adhesively electrically connected to the first electrode and the second electrodes, correspondingly. The plurality of first power supply circuits is connectedly provided with a first connective circuit, and the second power supply circuits are connectedly provided with a second connective circuit. The first connective circuit and second connective circuit are provided on the power supply substrate, instead of provided on the light-emitting device directly. Thus, the area of active luminescence region is relatively enlarged, whereby the luminous yield is enhanced accordingly.
Owner:OPTO TECH
Extra electric energy for day-night cycle solar aircraft
InactiveUS7898789B1Improve efficiencyReduced wing areaUnmanned aerial vehiclesEnergy efficient board measuresElectric powerAtmosphere
An Extra Electric Energy System that supplies electrical power to an aircraft of the continuous flight duration day / night cycle solar powered type is described where the extra electric energy is generated as static charge by collisions of the aircraft with particles existing in the earth's atmosphere. The manner in which the static charge is collected, stored and used immediately to meet present or future aircraft power needs is considered. An example of the application of the system to a high altitude solar powered Helios type aircraft is offered along with a discussion of how its structure is modified to store static charge.
Owner:JARVINEN PHILIP ONNI
Adaptive hierarchical structure light-based touch detection system and method
ActiveCN103336634AHigh measurement accuracyImprove measurement accuracyInput/output processes for data processingPattern recognitionImaging quality
The invention provides an adaptive hierarchical structure light-based touch detection system and method. The system comprises a touch detection unit, a projection unit, an image sensing unit and a control unit, wherein the touch detection unit is used for receiving original interface image data from the exterior of the system, receiving a projection region image data photographed by the image sensing unit and processing the image data, and acquiring and outputting touch information of a touched object; the projection unit is used for projecting an original interface image to a projection plane to image; the image sensing unit is used for acquiring and outputting the projection region image data; and the control unit is used for controlling ordered cooperative work between every two units and controlling the synchronization between the projection unit and the image sensing unit. By using a structure light three-dimensional measurement principle, the distance between the touched object and the projection plane can be accurately measured, and the measurement precision and the touch detection accuracy are guaranteed; the amount of calculation of structure light generation and extraction is reduced; and the problem of flickering of hidden embedded structure light or image quality reduction is effectively solved.
Owner:TSINGHUA UNIV
Electronic product protective sleeve provided with flashlight
The invention discloses an electronic product protective sleeve provided with a flashlight. The protective sleeve comprises a protective sleeve casing, a photosensitive element, at least one light-emitting element and a control circuit driving the light-emitting elements to flash, wherein the photosensitive element, the light-emitting elements and the control circuit are fixed on the protective sleeve casing; when a mobile phone is matched inside the protective sleeve casing, the position of the photosensitive element corresponds to the position of a flashlight of the mobile phone; and the flashlight of the mobile phone triggers the photosensitive element so as to trigger the control circuit to drive the light-emitting elements to flash. According to the protective sleeve, a design of integration of the flashlight with the protective sleeve of the mobile phone is adopted, so that the protective sleeve is small in size and convenient to carry; the protective sleeve is triggered through the flashlight of the original mobile phone, is quick in reaction speed and synchronizes with the flashlight of the original mobile phone, no software is required to be installed in the mobile phone, and an operation mode is identical with that of the original mobile phone; an independent battery is arranged inside, power supplied to the mobile phone is not affected, when the flashlight does not work, the quiescent current is extremely small, and the working time is greatly prolonged.
Owner:于红勇
Multi-gated, high-mobility, density improved devices
Disclosed herein are embodiments of an improved method of forming p-type and n-type MUGFETs with high mobility crystalline planes in high-density, chevron-patterned, CMOS devices. Specifically, semiconductor fins are formed in a chevron layout oriented along the centerline of a wafer. Gates are formed adjacent to the semiconductor fins such that they are approximately perpendicular to the centerline. Then, masked implant sequences are performed, during which halo and / or source / drain dopants are implanted into the sidewalls of the semiconductor fins on one side of the chevron layout and then into the sidewalls of the semiconductor fins on the opposite side of the chevron layout. The implant direction used during these implant sequences is substantially orthogonal to the gates in order to avoid mask shadowing, which can obstruct dopant implantation when separation between the semiconductor fins in the chevron layout is scaled (i.e., when device density is increased).
Owner:GLOBALFOUNDRIES INC
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