Crystal bar measurement device

A measuring device and ingot technology, which is applied in the field of ingot processing and manufacturing, can solve problems such as low measurement accuracy and uneven ingot surface, and achieve the effects of improving accuracy, minimizing physical damage, and improving quality

Inactive Publication Date: 2019-03-22
XIAN ESWIN SILICON WAFER TECH CO LTD
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  • Abstract
  • Description
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Problems solved by technology

[0003] The embodiment of the present invention provides a measuring device for ingots to solve the problem of low measurement accuracy due to uneven surfaces of ingots

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Embodiment Construction

[0024] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0025] The terms "first", "second" and the like in the description and claims of the present invention are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of practice in sequences other than those illustrated or described herein.

[0026] see Figure 1 to Figure 2 , the embodiment of the present invention provides a crystal ingot measuring device, the measuring device includes: a support 1, a main column 2 and at least two displacement sensors 3, wherein the displacement sensor 3 can be used to measure the outer dia...

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Abstract

The embodiment of the invention provides a crystal bar measurement device. The crystal bar measurement device comprises a support, a main column and at least two displacement sensors. A supporting piece used for supporting a crystal bar is arranged on the support; the main column can move relative to the support; the displacement sensors are fixed to the main column, and one of the displacement sensors is located on one side of the main column, and the other one of the displacement sensors is located on the other side of the main column, the displacement sensors which are located on the two sides of the main columns respectively carries out detection facing the crystal bar. By means of the measurement device, measurement values of the crystal bar at a plurality of measurement positions canbe obtained, the accuracy of the measurement values can be improved, therefore, the technical parameters of the next technical process are more precisely determined, and then the quality of the crystal bar is improved. Moreover, a non-contact measurement way is adopted by the measurement device, the physical damage to the surface of the crystal bar can be minimized.

Description

technical field [0001] The invention relates to the field of processing and manufacturing crystal rods, in particular to a measuring device for crystal rods. Background technique [0002] Usually, in the growth process of the ingot, it is necessary to determine the process parameters of the next process by analyzing the measurement data of the ingot in the previous process, such as the outer diameter and length of the ingot (except for both ends) . Most of the existing measurement methods are measured manually. Since the surface of the ingot is uneven (the surface of the ingot is uneven and wavy), and the measurement positions selected by different inspectors are different, it will lead to different inspections. The measurement values ​​obtained by personnel are also different, which makes the accuracy of the measurement data low. It is difficult to accurately determine the process parameters of the next process through the existing measurement means, which seriously affect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/02G01B21/10
CPCG01B21/02G01B21/10
Inventor 姜镕
Owner XIAN ESWIN SILICON WAFER TECH CO LTD
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